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Device for detecting high precision micro-cantilever beams phase and amplitude

A micro-cantilever, high-precision technology, used in the field of ultra-precision signal measurement systems

Inactive Publication Date: 2007-10-31
王彦杰
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Finally, Taiwan Patent No. 580573 does not have the dynamic drive signal controller and dynamic signal compensator described in the present invention, so the method proposed in this patent cannot respond to different piezoelectric materials actuated by sensors and different physical quantities Measurement for compensation of dynamic signals

Method used

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  • Device for detecting high precision micro-cantilever beams phase and amplitude
  • Device for detecting high precision micro-cantilever beams phase and amplitude
  • Device for detecting high precision micro-cantilever beams phase and amplitude

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Embodiment Construction

[0054] The present invention uses a dynamic cantilever drive system and a continuous analog high-sensitivity micro-cantilever phase and amplitude detection device to convert the amplitude and phase changes of the micro-cantilever caused by changes in nanometer-level physical quantities. Corresponding voltage changes, by analyzing and observing the above-mentioned voltage signal changes that are completely positively correlated with the amplitude and phase, the surface topography of the sample to be tested, or the temperature around the sensor can be deduced , humidity, and pressure changes. The following will be described in detail:

[0055] As shown in Figure 1-Figure 7:

[0056] The central control unit 1 is used to determine the frequency of the driving signal of the sensor 5, convert this frequency into a digital signal, and output the digital signal to control the numerically controlled oscillator 2 to generate a fixed frequency sine wave required for system operation. ...

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Abstract

This invention relates to one fine micro hanging beam phase and vibration detection device, which comprises the following parts: central control unit, sense drive circuit and detection circuit, signal conversion to sense physical signal, amplification and filter circuit, phase displacement circuit, resonance and phase signal converter, dynamic signal compensator device and multi-channel accurate comparison converter, wherein it detects one micro hanging beam under physical volume to change vibration range and phase and to convert the phase into voltage change and to change voltage into multi-channel comparison converter.

Description

technical field [0001] The present invention relates to an ultra-precise signal measurement system, especially a high-precision micro-cantilever beam phase and amplitude detection device. This measurement mechanism and method are widely used in nanometer-level measurement And testing instruments, such as scanning probe microscopes, atomic force microscopes, scanning capacitance microscopes, scanning resistance microscopes, and precision temperature and humidity measuring instruments. Background technique [0002] The previous phase detection technology, as described in Chinese Taiwan Patent No. 580573, requires two direct digital synthesizers to generate two sine wave signals for its detection device, and the cost is obviously higher, and it is controlled by only one central control unit compared with the present invention. A numerically controlled oscillator varies by producing a sine wave at the specific frequency required for operation. Secondly, Taiwan Patent No. 580573...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G08C19/16G01D5/243
Inventor 王彦杰
Owner 王彦杰