Protection film components containing vessel and manufacturing method thereof
A technology of protective film and storage container, which can be used in semiconductor/solid-state device manufacturing, instruments, electrical components, etc., and can solve problems such as difficulty in cleaning photomasks
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[0066] Hereinafter, examples of the present invention will be described, but the present invention is not limited thereto.
[0067] The pellicle storage container 10 shown in FIGS. 1 and 2 was produced. The structure of the pellicle assembly storage container 10 is mainly composed of a container body 1 and a container cover 2, both of which are antistatic ABS resin (surface resistance value 5×10 11 Ω / □) formed by molding.
[0068] In the pellicle assembly storage container 10 of FIG. 1 , the top surface of the cover body 2 is designed to form a convex shape even if bent due to its own weight, so that the top surface will not adhere to the pellicle 3 .
[0069] In the pellicle assembly storage container 10 of FIG. 2 , the top surface of the cover body 2 is designed to be in a gentle convex shape, so as to counteract the bending amount caused by the weight of the top surface itself and make it horizontal.
[0070] Fig. 3 is a diagram showing a vacuum forming mold used to manuf...
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