Removal of metal ions from onium hydroxides and onium salt solutions
A technology of metal ions and salt solutions, applied in chemical instruments and methods, ion exchange, cation exchange, etc., can solve problems such as difficulties
Active Publication Date: 2008-01-30
SACHEM INC
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Therefore, recycling used onium base raw materials in semiconductor
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The present invention relates to a method for removing dissolved metal ions from onium base and/or salt solutions, the method comprising providing a weak acid ion exchange medium; providing a solution containing magnesium ions; passing the ion exchange medium with a solution containing contacting a solution of magnesium ions to form a magnesium ion-loaded exchange medium; contacting the magnesium ion-loaded exchange medium with an onium base and/or salt solution containing a first amount of dissolved metal ions, wherein at least part of the dissolved metal ions are removed from the onium base and/or salt solution removal; and collecting the onium base and/or salt solution after contacting, wherein the collected solution contains a second amount of dissolved metal ions that is less than the first amount. The onium base and/or salt can be a tetramethylammonium base and/or salt by which the metal content can be reduced to about 1 parts per billion or less.
Description
technical field [0001] The present invention relates to a process for the removal of trace metal ions, such as aluminum, from onium hydroxide and / or onium salt solutions. Background technique [0002] Onium bases, such as tetramethylammonium base, are used in semiconductor processing. Such onium bases require extremely high purity. For example, the SEMI C46-0699 specification for aluminum ions requires less than 10 parts per billion (ppb) of aluminum in 25% tetramethylammonium base. [0003] Environmental and economical considerations drive the desire to recover raw materials, including raw onium bases such as those used in semiconductor processing. Raw materials such as onium bases and onium salts are objects that must be strictly complied with environmental regulations. Producing new onium bases and onium salts is much more expensive than recycling used onium bases and onium salts. However, the use of raw materials such as onium bases in semiconductor processing inevit...
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Login to view more IPC IPC(8): C07C209/84C07C211/63
CPCB01J39/046C02F2101/20C07C209/84C02F2103/346B01J39/07Y02P10/20C07C211/63
Inventor 新述孝夫威尔弗雷德·韦恩·威尔逊
Owner SACHEM INC
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