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Vacuum pump arrangement

A vacuum pump and vacuum chamber technology, which is used in pumps, components of pumping devices for elastic fluids, pump control, etc., and can solve problems such as operator injury, broken jaws, and damage to the vacuum chamber shell.

Inactive Publication Date: 2008-04-30
OERLIKON LEYBOLD VACUUM
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Damage to the vacuum chamber housing is particularly disadvantageous because, in addition to replacing the vacuum pump, the vacuum chamber housing must also be repaired
Not only does this lead to high costs, but it can also interrupt production for a long time
It may also happen that the jaws break off completely at the pump flange and the vacuum pump is no longer held in the vacuum chamber housing, allowing the vacuum pump to fall
In addition to damaging the vacuum chamber housing, this can be highly dangerous for operating personnel

Method used

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Examples

Experimental program
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Embodiment Construction

[0016] The vacuum pump arrangement comprises a pump housing 10 in which a rotor 14 rotating about a longitudinal axis 12 is arranged. Stator blades 16 connected to the pump casing 10 are disposed between the respective rotor blades 14 . The rotor 14 is rigidly connected to the drive shaft 20 via a connecting element 18 . The stator 16 is correspondingly rigidly connected to the pump housing 10 via a connecting element 22 .

[0017] In order to generate a vacuum within the vacuum chamber 24 , the pump housing is fastened to the vacuum chamber housing 26 in the region of the opening 28 .

[0018] For fastening, the pump housing has a pump flange 30 which is annular in the embodiment shown. The pump flange 30 has an L-shaped cross-section, forming an annular groove 32 .

[0019] The pump housing 10 is fastened to the vacuum chamber housing 26 by means of the retaining element 34 by the flange 30 . For this purpose, the retaining element 34 in the embodiment shown has a projec...

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PUM

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Abstract

A vacuum pump arrangement, especially a turbomolecular pump arrangement, comprises a rotor (14) and a stator (16) in a pump housing (10). The pump housing (10) is connected to a vacuum chamber housing (26) through a pump flange (10). Retaining elements (34) are provided for this connection. To avoid a twisting of the retaining elements (34) in the event of a damage, such as the blocking of the rotor (14) and the high moments occurring thereby, the retaining element (34) comprises an anti-twist structure (40) cooperating with the vacuum chamber housing (26).

Description

technical field [0001] The invention relates to a vacuum pump device, in particular to a turbomolecular pump device. Background technique [0002] A vacuum pump, such as a turbomolecular pump, is connected to the vacuum chamber housing to generate a vacuum within the vacuum chamber. The connection is realized with a pump flange connected to the pump casing and corresponding retaining elements such as so-called claws. The claws are connected to the pump flange, eg the protrusions of the claws engage the grooves or grooves of the pump flange. The jaws are fastened to the vacuum chamber housing by means of screws. Since the vacuum pump weighs 65 kg and the rotor located in the pump housing is capable of revolutions in the range of 30,000 to 100,000 rpm, high standards of safety must be met. Due to the high weight and the high rotor speed, the secure fastening of the vacuum pump on the vacuum chamber housing must be ensured with a high degree of certainty in order to preclude...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F04D19/04F04D29/66F04D29/64
CPCF04D27/0292F04D29/601F04D27/008F04D19/042
Inventor 迪尔克·卡利施罗伯特·施托勒海因茨-迪特尔·奥登达尔
Owner OERLIKON LEYBOLD VACUUM