Wafer carrier vehicle

A technology of transport vehicles and wafers, which is applied in transportation and packaging, trolleys, motor vehicles, etc. It can solve the problems of chronic pain in the back and waist of workers, affect the physical and mental health of employees, and achieve the effect of avoiding human injury
CN101229816AInactive Publication Date: 2008-07-30SHANGHAI JL SHANGHAI INT TRADING
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Patent Information

Authority / Receiving Office
CN Β· China
Current Assignee / Owner
SHANGHAI JL SHANGHAI INT TRADING
Publication Date
2008-07-30
Estimated Expiration
Not applicable Β· inactive patent

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Abstract

The invention discloses a wafer carrier vehicle. The shelf height of an existing fixed shelf trolley with a plurality of layers does not accord with the principle of human engineering and cannot be adjusted, so the back or waist of the operating personnel is easy to be hurt when taking crystal cells from the shelf or placing crystal cells on the shelf, and the damage on health is great due to long-term work. Aimed at solving the problem, the invention provides the wafer carrier vehicle with a movable shelf, which comprises a body and a shelf having two layers. The invention applies a different design of an upper shelf plate to match with a corresponding lifting driving device, thus facilitating the lifting of a lower shelf plate. By applying the carrier vehicle of the invention, the height of the shelf can be adjusted to an extent according with the principle of human engineering, so as to prevent the operating personnel from being hurt.
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Description

technical field

[0001] The invention relates to a wafer transportation device, in particular to a wafer transportation vehicle with a movable shelf. Background technique

[0002] As the size of the wafer increases from 8 inches to 12 inches, the size of the front-opening wafer box (FOUP) and its spare parts used to place the wafer is also increasing, which makes the weight of the wafer box continue to increase. The weight of the FOUP of the wafer is about 9.8Kg. This increase in size and weight probably wouldn't pose any significant ergonomic risk if the materials were automated. However, fully automated operations cannot be fully realized, so there are inevitably still manual handling, such as chip measurement, and handling crystal boxes to manual shelves. As more and more chip manufacturers move to Asia, and most of the workers are women, the size and weight problems of FOUP become more obvious.

[0003] From the perspective of ergonomics, the ideal lifting height when ...

Claims

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