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Ggrinding wheel installation method

An installation method and a grinding wheel technology are applied to the device for fixing the grinding wheel, the components of the grinding machine tool, and the grinding/polishing equipment, etc., which can solve the problems of component damage, reduced grinding performance, collision, etc., to prevent damage, The effect of improving installability

Active Publication Date: 2008-09-03
DISCO CORP
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  • Summary
  • Abstract
  • Description
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AI Technical Summary

Problems solved by technology

[0005] However, since the grinding wheel is directly mounted in direct contact with the grinding wheel, the grinding wheel may be damaged during the mounting work and the grinding performance may be reduced.
Moreover, when holding the grinding wheel and taking it to the wheel seat, the grinding tool may also collide with internal parts of the grinding device such as the chuck table, thereby causing damage to the internal parts

Method used

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  • Ggrinding wheel installation method
  • Ggrinding wheel installation method
  • Ggrinding wheel installation method

Examples

Experimental program
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Embodiment Construction

[0027] Hereinafter, an embodiment of a grinding wheel mounting method as the best mode for carrying out the present invention will be described in detail with reference to the drawings.

[0028] First refer to Figure 1 to Figure 6 The outline of the grinding machine and the basic operation of grinding wheel installation will be explained. figure 1 It is a perspective view which shows the structural example of the grinding apparatus to which the grinding wheel mounting method of this embodiment is applied. figure 1 The shown grinding device 1 is a device for grinding the surface of a workpiece W such as a wafer to be finished to a desired thickness, and has: a chuck table 2 that is rotatable and movable in the horizontal direction; A grinding unit 3 that performs grinding on the workpiece W on the chuck table 2 ; and a grinding unit driving unit 4 that drives the grinding unit 3 in a vertical direction.

[0029] The grinding unit driving part 4 is composed of the following c...

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Abstract

The invention provides a mounting method for a grinding wheel, by which a grinding tool and the inside of a grinding device may not be damaged when the grinding wheel is mounted on a wheel seat. A holding member (5) accommodates the free end surface (331) of a grinding wheel (33) in a state of covering a grinding tool portion (332), the free end surface (331) is accommodated in the holding member (5) while the exposed fixed end surface (334) of a frame portion (320) contacts with a wheel seat (32), the free end surface and the fixed end surface are fixed by a fixing unit, thereby the grinding wheel (33) can be mounted without direct contact with the grinding tool (332).

Description

technical field [0001] The invention relates to a grinding wheel mounting method for mounting a grinding wheel with a grinding tool portion on a wheel base. Background technique [0002] Regarding wafers formed with devices such as LSI (large scale integration) and IC (Integrated Circuit: integrated circuits), the back surface is ground to a predetermined thickness, and processing equipment such as dicing equipment is used to It is divided into individual devices and used in electronic equipment such as mobile phones and personal computers. In the grinding device, grinding is performed by using an annular grinding wheel, on the outer periphery of which a grinding wheel having a width of 2 to 3 mm is arranged in a ring shape, and the grinding wheel has the same size as the object to be ground the outer diameter. Here, the grinding wheel is mounted as follows: the grinding wheel is taken out from the box, and the operator mounts it on the wheel base while holding the cutting...

Claims

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Application Information

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IPC IPC(8): B24B45/00B24B41/04
CPCB24B45/00B24B45/003
Inventor 古贺博己青木繁彦池谷和人佐藤大介松村有里子
Owner DISCO CORP
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