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Coaxial spray type showerhead and uses thereof

A spray type and nozzle technology, which is applied in the field of coaxial spray nozzles, can solve the problems of difficult mixing of two gases, dense air intake channels, and difficult processing and production, and achieve the effect of optimizing the mixing degree of air flow and gas

Inactive Publication Date: 2008-10-29
孙小卫 +1
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  • Abstract
  • Description
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  • Application Information

AI Technical Summary

Problems solved by technology

[0003] The purpose of the present invention is to provide a coaxial spraying nozzle and its application to solve the problems of the chemical vapor

Method used

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  • Coaxial spray type showerhead and uses thereof
  • Coaxial spray type showerhead and uses thereof
  • Coaxial spray type showerhead and uses thereof

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Embodiment Construction

[0027] Such as Figure 1-6 As shown, the present invention adopts the coaxial design spray nozzle mainly to comprise: two layers of air intake channels (upper air intake channel 7 and lower air intake channel 8), a set of two hollow coaxial tubes with different diameters connected thereto 15 (inner pipe 10 and outer pipe 11) and a layer of water cooling chamber 9, two layers of air intake passages (i.e. two separate gas chambers), one layer of water cooling chambers are separated by discs 13 between each layer, small diameter tubes - Inner pipe 10 and large diameter pipe - Outer pipe 11 communicates with upper intake passage 7 and lower intake passage 8 respectively; upper intake passage 7 communicates with intake pipe I1, and lower intake passage 8 communicates with intake pipe II2 , to grow thin films by spraying two gas-phase reactants. A layer of water cooling chamber 9 is added around the outer pipe 11 of the coaxial pipe 15. The water cooling chamber 9 is adjacent to th...

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Abstract

The invention relates to a coaxially arranged spray-type spraying nozzle and the application thereof, which is used in the technological process of preparing the thin film by using a chemical vapor deposition method and a metal-organic chemical vapor deposition method, and enables the required reacting gas or plasma to be sprayed out and form film through the dual channel or multi-channel coaxial spraying nozzle designed by the invention. The coaxial spray-type spraying nozzle is provided with gas inlet channels and coaxial tubes, wherein the coaxial tubes respectively communicate with the corresponding gas inlet channels. The coaxial spray-type spraying nozzle solves the problems that in the chemical vapor deposition, two types of gases are not easy to be fully mixed, the gas inlet channels are excessively dense, and the processing and the fabrication are difficult; the coaxial spray-type spraying nozzle is suitable for the chemical vapor deposition process of growing film (or nano-structure) through two gas phase reactants, and the growable material comprises SiO2, GaN and ZnO; at the same time, the coaxial spray-type spraying nozzle also aims to serve the purpose that three or more types of reacting gases or plasma are sprayed through the spaying nozzle so as to be used in the deposition of a large-area even thin film.

Description

technical field [0001] The present invention relates to a coaxial spray nozzle and its application, which is used in the process of preparing thin films by chemical vapor deposition (CVD) and metal organic chemical vapor deposition (MOCVD), through which the required reaction gas or plasma is passed. Invented and designed double-channel or multi-channel coaxial spray head sprays to form a film. Background technique [0002] Chemical vapor deposition (CVD) and metalorganic chemical vapor deposition (MOCVD) are widely used to prepare conformal dielectric films such as SiO 2 thin films; and active layer semiconductor thin films for light-emitting diodes and laser diodes. CVD and MOCVD systems widely use spray nozzles to generate laminar flow and deposit uniform films. The shower head technology is also a technology that is easy to expand and upgrade. By simply expanding the area of ​​the shower head, the film forming area of ​​the entire thin film deposition system can be inc...

Claims

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Application Information

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IPC IPC(8): C23C16/44C23C16/30B05B1/14B05B7/04
Inventor 孙小卫刘立宁
Owner 孙小卫
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