Transmission module
A transmission module and moving axis technology, applied in optics, instruments, furnaces, etc., can solve problems such as substrate fragmentation, retention, and impact on transmission accuracy, and achieve the effect of improving accuracy and reducing the number of adjustments
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[0068] In order to make the above and other objects, features and advantages of the present invention more comprehensible, preferred embodiments are described below in detail with accompanying drawings.
[0069] Fig. 2 is a schematic partial top view of a transmission module of the present invention. Referring to FIG. 2 , the transmission module 200 is suitable for transferring a substrate 210 such that the substrate 210 moves along the moving axis A1 , wherein the substrate 210 may be a glass substrate, a wafer or other objects to be processed. The substrate 210 has an upper surface 212 , a lower surface 214 opposite to the upper surface 212 , and two opposite sides 216 (shown in FIG. 3 ) connecting the upper surface 212 and the lower surface 214 . As shown in FIG. 2 , the transmission module 200 is mainly composed of a transmission device 220 , a fixing seat 230 and a plurality of penetrating parts 240 , wherein the material of the fixing seat 230 is, for example, stainless ...
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