Transmission module

A transmission module and moving axis technology, applied in optics, instruments, furnaces, etc., can solve problems such as substrate fragmentation, retention, and impact on transmission accuracy, and achieve the effect of improving accuracy and reducing the number of adjustments

Active Publication Date: 2008-12-10
AU OPTRONICS CORP
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Problems solved by technology

[0007] In this way, not only will the accuracy of the transmission be affected, but in severe cases, the substrate will be broken, or the particles generated by the friction between the substrate and the guide roller will be retained in the produced product, especially for integrated For semiconductor processes with high dust-free requirements such as circuits or liquid crystal displays, this transmission module composed of individually adjustable guide rollers is a big killer for product productivity and pass rate

Method used

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Embodiment Construction

[0068] In order to make the above and other objects, features and advantages of the present invention more comprehensible, preferred embodiments are described below in detail with accompanying drawings.

[0069] Fig. 2 is a schematic partial top view of a transmission module of the present invention. Referring to FIG. 2 , the transmission module 200 is suitable for transferring a substrate 210 such that the substrate 210 moves along the moving axis A1 , wherein the substrate 210 may be a glass substrate, a wafer or other objects to be processed. The substrate 210 has an upper surface 212 , a lower surface 214 opposite to the upper surface 212 , and two opposite sides 216 (shown in FIG. 3 ) connecting the upper surface 212 and the lower surface 214 . As shown in FIG. 2 , the transmission module 200 is mainly composed of a transmission device 220 , a fixing seat 230 and a plurality of penetrating parts 240 , wherein the material of the fixing seat 230 is, for example, stainless ...

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Abstract

The invention discloses a transmission module which is used for transmitting a base plate. The base plate is provided with an upper surface, a lower surface and two opposite side surfaces, and moves along a movement axis. The transmission module comprises a transmission device, a fixing seat and a plurality of penetrating members; wherein, the transmission device comprises a plurality of first supporting idler wheels, a plurality of first transmission idler wheels and a plurality of guiding idler wheels; wherein, each first supporting idler wheel and each first transmission idler wheel are respectively arranged along a supporting axis and a transmission axis and are respectively contact the lower surface and the upper surface, and the movement axis and the supporting axis are parallel to each other. Each guiding idler wheel is arranged along a guiding axis and is close to one of the side surfaces, the guiding axis is perpendicular to the supporting axis and the transmission axis, and the movement axis is perpendicular to the supporting axis, the transmission axis and the guiding axis. In addition, the penetrating members and the fixing seat are integrally formed, and each penetrating member is penetrated through one of guiding idler wheels.

Description

technical field [0001] The present invention relates to a transmission module, and in particular relates to a transmission module with a guiding direction for substrate transmission. Background technique [0002] Aiming at the rapid progress of the multimedia society, most benefit from the rapid progress of semiconductor components or man-machine display devices. As far as display devices are concerned, flat panel display devices with superior characteristics such as high image quality, good space utilization efficiency, low power consumption, and no radiation have gradually become the mainstream of the market. Among various flat display devices, the liquid crystal display is a relatively mature flat display device at present. A liquid crystal display is mainly composed of a liquid crystal display panel and a backlight module. [0003] Generally speaking, in the manufacturing process of liquid crystal displays, the production capacity and manufacturing pass rate of product...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02F1/1333H01L21/677B65G47/22B65G49/06
Inventor 侯翔殷翁启雄陈家豪林青辉
Owner AU OPTRONICS CORP
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