Inclined plane receiving photodetector with optical fiber locating slot and method for making array thereof

Abstract

The invention relates to the field of the optical fiber communication technology, and discloses a manufacturing method of an inclined plane receiving photodetector with an optical fiber positioning slot; the method comprises the following step: the corrosion technology of the optical fiber positioning slot is added in the manufacturing process of inclined plane receiving photodetector (SVPC), a semiconductor substrate is corrupted to form the optical fiber positioning slot used for containing and aligning with the optical fiber on the opposite side of the SVPC toward the direction of the SVPC active area, the optical fiber positioning slot and the SVPD are integrated into a whole, and the optical fiber center positioned on the optical fiber positioning slot precisely aligns with the active area center of the SVPC. The invention simultaneously discloses a manufacturing method of the inclined plane receiving photodetector with the optical fiber positioning slot. By using the invention, the alignment accuracy of the optical fiber and the SVPC is in micron dimension, the drift problem of the positioning accuracy is overcome, the reliability of the positioning accuracy is improved, the difficulty of the optical fiber alignment positioning is reduced, and the cost of the optical fiber alignment positioning is reduced.

Description

technical field [0001] The invention relates to the technical field of optical fiber communication, and relates to a manufacturing method of a novel photoelectric detector, in particular to a manufacturing method of a slope receiving photodetector with an optical fiber positioning groove and an array thereof. Background technique [0002] With the rapid development of digital informationization, the demand for large-capacity and high-speed data exchange of supercomputers and servers continues to increase. Optical fiber communication is not only widely used in long-distance communication, but also has broad application prospects in the field of short-distance high-speed data communication between base station antennas and control stations, between servers in buildings, between cabinets, and between optical backplanes. The cost of optical components that make up optical interconnection is the main factor restricting the large-scale application of optical fiber communication, a...

AI Technical Summary

Problems solved by technology

The active alignment method is to work simultaneously with light emission and reception during the alignment process, adjust the optical components, and monitor the optical signal until the optical signal is the strongest. The efficiency is extremely low and the cost of optical modules is high

The passive alignment method is to use the optical fiber positioning device to realize the alignment of the optical fiber and the optoelectronic device. The advantage is high efficiency and low cost. The disadvantage is that it requires an accurate alignment device and it is difficult to ensure the coupling efficiency.

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