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Storage, transporting system and storage set

A technology of vaulting, in-out and out-of-warehouse, which is applied in the field of vaults and can solve the problems of man-hours and costs for maintenance, high cost, complicated control and structure, etc.

Inactive Publication Date: 2009-03-18
MURATA MASCH LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] However, according to the above-mentioned Patent Documents 1 and 2, firstly, there are the following technical problems: the control and structure of the transportation device in the storage room such as the stacking robot are basically becoming more and more complicated, the cost is high, and the maintenance also requires man-hours and costs.

Method used

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  • Storage, transporting system and storage set
  • Storage, transporting system and storage set
  • Storage, transporting system and storage set

Examples

Experimental program
Comparison scheme
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no. 1 Embodiment approach

[0103] First, refer to figure 1 The storage room structure of the first embodiment will be described through FIG. 3 . it's here, figure 1 It is a perspective view showing the appearance of the transportation system having the storage room according to the first embodiment, figure 2 is a schematic representation figure 1 Fig. 3 is a cross-sectional view showing the engagement state of the first loading surface and the second loading surface with respect to the goods in the first embodiment.

[0104] In particular, the first embodiment is an embodiment of the "first storage" of the present invention.

[0105] exist figure 1 Among them, the transportation system 100 has a track 1 , a transportation vehicle 2 , a stocker (storage) 10 , and a controller 20 . The transport system 100 drives the transport vehicle 2 to transport the FOUP 3 on the track 1 . The rail 1 is an example of the "rail" of the present invention, and functions as a rail for the transport vehicle 2 to mov...

no. 2 Embodiment approach

[0132] Next, refer to Figure 5 A modified example of the storage box of the first embodiment which is the second embodiment of the present invention will be described. it's here, Figure 5 Shows the appearance of the transfer system with the storage warehouse of the second embodiment, which is the same as figure 1 Perspective for the same purpose, specifically, in Figure 5 In the shown storage room, a storage opening for storage and a storage opening for storage are respectively set, and they are arranged so that the direction of the horizontal side in which the loading unit moves is parallel to the rails. and, in Figure 5 In the handling system shown, with respect to figure 1 Elements with the same structure in the conveying system 100 shown are denoted by the same reference numerals, and their descriptions are omitted.

[0133] In particular, the second embodiment is an embodiment of the "first storage" of the present invention.

[0134] exist Figure 5 Among them,...

no. 3 Embodiment approach

[0146] Next, a modified example of the storage box according to the second embodiment which is the third embodiment of the present invention will be described with reference to FIG. 7 . Here, FIG. 7 is a plan view showing the rails of the conveyance system according to the third embodiment, specifically, rails leading to two storage ports of the storage warehouse according to the second embodiment. Also, in the transport system shown in Fig. 7, regarding the Figure 5 Elements with the same structure in the conveying system 200 shown are denoted by the same reference numerals, and their descriptions are omitted.

[0147] In particular, the third embodiment is an embodiment of the "second storage" of the present invention.

[0148] In FIG. 7 , a transportation system 300 has a rail 1 , a transportation vehicle 2 , and a stocker 40 . The conveyance system 300 controls the conveyance vehicle 2 and the stocker 40 through a controller not shown, and conveys the FOUP 3 on the trac...

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Abstract

A storage accepts FOUP of a plurality of baseplates for manufacturing semiconductor components, e.g. the storage of a stocker for temporarily keeping goods of FOUP and the like, for performing in and out of the storage on the goods effectively in a simple structure, or effectively performing transportation in the storage. The storage (10) comprises a supporting part (11) capable of supporting the goods (3); a horizontal driving part (13) capable of moving the supporting part back and forth in a horizontal direction; a vertical driving portion (14) capable of moving the supporting part back and forth in a vertical direction; and a plurality of racks (15) with putting surfaces, during a plurality of phases causing the supporting part to reach the vertical direction through the vertical driving, one or more than two rack(s) is / are arranged on the horizontal reached through the horizontal driving part, to respectively transport the goods between the racks and the supporting part. At least one of the putting surfaces functions as a port for unloading and loading the goods.

Description

technical field [0001] The present invention relates to the technical field of a storage warehouse. In the storage warehouse, in a transportation system for transporting goods such as FOUPs (Front Opening Unified Pods, wafer boxes) for storing various substrates for manufacturing semiconductor elements on rails, the Goods are temporarily stored in a location adjacent to the track. Background technique [0002] This kind of storage is laid adjacent to the rails on which transport vehicles such as vehicles move, and a plurality of shelf parts are provided in the storage to store a plurality of goods transported by the transport vehicles. Moreover, there is a "warehouse" for delivering or taking out and putting in (that is, entering and leaving the warehouse) between the storage and the transport vehicle for carrying out goods transportation (that is, storage) between the specified shelf parts. In-storage transportation) is an in-storage transportation device called a stacker ...

Claims

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Application Information

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IPC IPC(8): B65G1/02B65G1/04B65G49/07
Inventor 村田正直山路孝
Owner MURATA MASCH LTD
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