Crystal boat box with inlet valve

A crystal boat box and air inlet valve technology, which can be used in electrical components, packaging under vacuum/special atmosphere, packaging objects under special gas conditions, etc., which can solve the problems of chip damage and inconvenience in opening the boat box.

Inactive Publication Date: 2009-04-15
KING YUAN ELECTRONICS
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] In this way, the vacuum inside the box makes it inconvenient for the operator to open the crystal boat box. Even when opening it, the force is used too much, which causes the wafer

Method used

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  • Crystal boat box with inlet valve
  • Crystal boat box with inlet valve
  • Crystal boat box with inlet valve

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Experimental program
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Embodiment Construction

[0027] Please refer to FIG. 1, which is an exploded view of the first preferred embodiment of the present invention. As shown in the figure, the present invention is a wafer boat box with an air inlet valve, which mainly includes a box body 1 and an air inlet valve 2.

[0028] As shown in FIG. 1, the box body 1 of this embodiment includes a housing 11 and an internal space 12 therein. Wherein, the box body 1 of this embodiment is divided into a box cover 101 and a box body 102. The box cover 101 can be opened or is correspondingly closed on the box body 102 to form a closed internal space 12 around it. For ease of illustration and description, the case 11 in this example is an example of a top-opening wafer boat box for six-inch or eight-inch chips, and the case 11 located above the box cover 101 is taken as an example for illustration, but not This is a limitation. For example, the side surface or even the bottom surface of the entire box body 1 shown in FIG. 1 can be used; or th...

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PUM

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Abstract

The invention relates to a wafer cassette with an air intake valve. The wafer cassette comprises a cassette body and an air intake valve. The air intake valve is arranged on a casing of the cassette body and comprises a guide pole, a sealing cover, a sealing gasket and an elastic component. The air intake valve is provided with an elastic prestress by the elastic component to push the guide pole to ensure that the sealing cover covers over a through hole of the casing and ensure that the sealing gasket is pressed between the sealing cover and the casing to form air tightness. When a wafer cassette with vacuum at the inside is opened, only outside force is required to push the guide pole reversely to ensure that a gap is produced between the sealing cover and the casing, at the time, outside air enters into the inner space of the cassette body in a way that stream guidance passes through the gap by the through hole, so that the air pressures inside and outside the cassette body are balanced to be good for opening a cassette cover easily.

Description

Technical field [0001] The invention relates to a wafer boat box, in particular to a wafer boat box with an air inlet valve, so as to introduce external air into the wafer boat box to eliminate the vacuum in the box to achieve air pressure balance, and make the box cover easy to open . Background technique [0002] In addition to the function of protecting wafers in traditional wafer boat boxes, more attention should be paid to whether there are particles in the box that are sufficient to contaminate the cleanliness of the wafers during the transportation of the wafers. Therefore, when the wafer box is loaded with wafers, the gas in the wafer box is often evacuated, which can not only minimize the fine particles in the box, but also block the dry humidity of the outside air. The influence of the inner wafer. [0003] However, when the operator wants to take the chip from the wafer box, he must first use a tool to pry the box cover to open the wafer box. In addition to overcoming ...

Claims

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Application Information

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IPC IPC(8): H01L21/673B65D51/16B65D81/20
Inventor 戴碧辉
Owner KING YUAN ELECTRONICS
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