Cassette with air inlet valve

A crystal boat box and air intake valve technology, applied to electrical components, packaging under vacuum/special atmosphere, packaging objects under special gas conditions, etc., can solve problems such as chip damage and inconvenient opening of the crystal boat box

Inactive Publication Date: 2009-12-23
KING YUAN ELECTRONICS
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] In this way, the vacuum inside the box makes it inconvenient for the operator to open the crystal boat box. Even when opening it, the force is used too much, which causes the wafer box to overturn and cause damage to the wafer. In order to make the wafer box easier to open, It is extremely necessary to improve the problem of relative vacuum in the crystal boat box

Method used

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  • Cassette with air inlet valve
  • Cassette with air inlet valve
  • Cassette with air inlet valve

Examples

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Embodiment Construction

[0027] see figure 1 , which is an exploded view of the first preferred embodiment of the present invention. As shown in the figure, the present invention is a wafer box with an air inlet valve, which mainly includes a box body 1 and an air inlet valve 2 .

[0028] Such as figure 1 As shown, the box body 1 of this embodiment includes an outer shell 11 and an inner space 12 therein. Wherein, the box body 1 of this embodiment is divided into a box cover 101 and a box body 102 , the box cover 101 can be opened, or correspondingly closed on the top of the box body 102 to form a closed inner space 12 . For ease of illustration and description, the shell 11 of this example is an example with the top-opening crystal boat box used for wafers at six o'clock or eight o'clock, and the shell 11 positioned at the top of the box cover 101 is used as an example to illustrate, but not with This is the limit, all figure 1 The side, or even the bottom surface of the entire box body 1 shown c...

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PUM

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Abstract

The invention relates to a crystal boat box with an air inlet valve, which includes a box body and an air inlet valve. The intake valve is arranged on the shell of the box body, which includes a guide post, a sealing cover, a sealing washer and an elastic component. The intake valve is provided with an elastic pre-force by the elastic component to push the guide post to cover the sealing cover on the through hole of the housing correspondingly, so that the sealing gasket is pressed between the sealing cover and the housing to form an airtight seal. Therefore, when you want to open a vacuum crystal boat box in a box, you only need to use an external force to reverse the deduction column, so that there is a gap between the sealing cover and the outer shell. The internal space of the box can balance the air pressure inside and outside the box, so that the box lid can be opened easily.

Description

technical field [0001] The invention relates to a crystal boat box, especially a crystal boat box with an air inlet valve, so that the external air can be introduced into the crystal boat box to eliminate the vacuum inside the box and achieve air pressure balance, so that the box cover can be opened easily . Background technique [0002] In addition to the function of protecting the wafer, the traditional wafer boat box pays more attention to whether there are particles in the box that are enough to pollute the cleanliness of the wafer during the wafer transportation process. Therefore, when the crystal boat box is loaded with wafers, the gas in the crystal boat box is often evacuated. In addition to minimizing the fine particles in the box, it can also block the dry humidity of the outside air. The effect of the inner chip. [0003] However, when the operator wants to take the chip from the crystal boat box, he must first pry off the box cover with a tool to open the crys...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/673B65D51/16B65D81/20
Inventor 戴碧辉
Owner KING YUAN ELECTRONICS
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