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Resistance straining feedback type closed-loop two-dimension flexible hinge work bench

A flexible hinge and resistance strain technology, which is applied in worktables, manufacturing tools, photolithography process exposure devices, etc., can solve the problems of low accuracy and stability of the displacement worktable, and achieve compact structure, high measurement accuracy, and high drive accuracy. Effect

Inactive Publication Date: 2010-10-13
XIAMEN UNIV
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AI Technical Summary

Problems solved by technology

[0005] The purpose of the present invention is to provide a resistance strain feedback closed-loop two-dimensional flexible hinge workbench with high displacement precision and good positioning stability for the problem of low precision and stability of the existing displacement workbench

Method used

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  • Resistance straining feedback type closed-loop two-dimension flexible hinge work bench
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  • Resistance straining feedback type closed-loop two-dimension flexible hinge work bench

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Embodiment Construction

[0016] see Figure 1~3 , the present invention is provided with a platform base 3, a mobile platform, a two-dimensional flexible hinge, a piezoelectric ceramic driver and a resistance strain displacement sensor.

[0017] The two-dimensional flexible hinge is provided with 4 horizontal flexible hinges 11 and 4 longitudinal flexible hinges 12, the piezoelectric ceramic driver is provided with a horizontal piezoelectric ceramic driver 2 and a vertical piezoelectric ceramic driver 5, and the mobile platform is provided with a horizontal mobile platform 4 and a vertical piezoelectric ceramic driver. The mobile platform 7, the resistance strain displacement sensor is provided with a horizontal resistance strain displacement sensor and a longitudinal resistance strain displacement sensor. Four horizontal flexible hinges 11 are arranged between the platform base 3 and the lateral moving platform 4, and are arranged symmetrically; The transverse piezoelectric ceramic driver 2 and the ...

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Abstract

An electric resistance strain feedback type loop locked two-dimensional flexible hinge worktable relates to a worktable. The invention aims to provide an electric resistance strain feedback type loop locked two-dimensional flexible hinge worktable with high displacement accuracy and good positioning stability. The worktable comprises a worktable support, a mobile platform, a two-dimensional flexible hinge, a piezoelectric ceramic driver and an electric resistance strain displacement sensor; the mobile platform is provided with a transversal mobile platform and a longitudinal mobile platform; the two-dimensional flexible hinge is provided with four transversal flexible hinges and four longitudinal flexible hinges; the piezoelectric ceramic driver is provided with a transversal piezoelectric ceramic driver and a longitudinal piezoelectric ceramic driver; and the electric resistance strain displacement sensor is provided with a transversal electric resistance strain displacement sensor and a longitudinal electric resistance strain displacement sensor. A bridge type output circuit is formed by both the transversal electric resistance strain displacement sensor and the longitudinal electric resistance strain displacement sensor.

Description

technical field [0001] The invention relates to a workbench, in particular to a resistance strain feedback closed-loop two-dimensional flexible hinge workbench driven by piezoelectric ceramics. Background technique [0002] In ultra-precision machining and measurement equipment, flexible hinged worktables driven by piezoelectric ceramics are mostly used to realize nanometer driving and positioning. Due to the problems of hysteresis, creep and nonlinearity in piezoelectric ceramics, the accuracy and positioning stability are limited. Therefore, it is necessary to use precision displacement sensors to perform closed-loop feedback control on the workbench to improve accuracy. At present, the capacitive displacement sensor integrated with the workbench is widely used. Because the capacitive sensor is greatly affected by changes in electromagnetic fields, edge effects, and ambient temperature, and the installation of the capacitive sensor on the workbench itself has great difficu...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G03F7/20B25H1/00
Inventor 张建寰
Owner XIAMEN UNIV
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