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Double probe same-point measurement scanning probe microscope

A scanning probe and dual-probe technology, applied in the field of scanning probe microscopes, can solve the problems of complicated control of dual-probe simultaneous measurement, difficulty in selecting different types of probes, etc., achieving low noise, avoiding manual adjustment, anti-interference and Strong vibration effect

Inactive Publication Date: 2012-11-07
UNIV OF SCI & TECH OF CHINA
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0008] The purpose of the present invention is to provide a simple and easy-to-control dual-probe simultaneous-point measurement scanning probe microscope to solve the above-mentioned problems of complex control of dual-probe same-point measurement and difficulty in selecting different types of probes

Method used

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  • Double probe same-point measurement scanning probe microscope
  • Double probe same-point measurement scanning probe microscope

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0044] Example 1: Parallel same-point measurement dual-probe scanning probe microscope

[0045] figure 1 It is a schematic diagram of the structure of the dual-probe scanning probe microscope for parallel and same-point measurement in the present invention. The sample 3 is fixed on the sample holder 3a, the sample holder 3a is fixed on the XY piezoelectric scanner 4, the first Z positioner 1a is fixed on the positioning seat 5, and the first probe 1 is fixed on the movement of the first Z positioner 1a end and point to the sample 3 to form the first Z adjuster; the second Z positioner 2a is fixed on the positioning seat 5, the second probe 2 is fixed on the moving end of the second Z positioner 2a and points to the sample 3, the positioning seat 5 and The XY piezoelectric scanner 4 is fixed on the substrate 6 to form a second Z adjuster. In this way, the spacing between the double needles 1, 2 and the sample 3 can be independently controlled. The first positioner 1a and the...

Embodiment 2

[0048] Example 2: Serial Same-Point Measurement Dual-probe Scanning Probe Microscope

[0049] The purpose of the second Z regulator in the above-mentioned embodiment 1 is to independently adjust the distance between the second probe 2 and the sample 3, so the second regulator can also be adjusted according to figure 2 The structure shown in the figure: the second probe 2 is fixed on the positioning seat 5 and points to the sample 3, the positioning seat 5 is fixed on the moving end of the second Z positioner 2a, and the second Z positioner 2a is fixed to the XY piezoelectric scanner 4 on the substrate 6. In this way, when the second Z positioner 2a performs Z telescopic adjustment, the distance between the sample 3 and the second probe 2 can be adjusted. Although the distance between the sample 3 and the first probe 1 also changes due to the serial connection between the first Z positioner 1a and the second Z positioner 2a, this distance can be adjusted by adjusting the firs...

Embodiment 3

[0050] Example 3: Linkage-type same-point measurement dual-probe scanning probe microscope

[0051] See image 3, the second probe 2 is fixed on the positioning seat 5 and points to the sample 3, the XY piezoelectric scanner 4 is fixed on the moving end of the second Z positioner 2a, and the second Z positioner 2a and the positioning seat 5 are both fixed on the substrate 6 superior. In this way, when the second Z positioner 2a performs Z telescopic adjustment, the entire XY piezoelectric scanner 4 and the sample 3 fixed on it will be linked to it, thereby adjusting the distance between the second probe 2 and the sample 3 . Although the distance between the sample 3 and the first probe 1 also changes accordingly, this distance can be adjusted by adjusting the first Z positioner 1a so that the first probe 1 and the sample 3 will not be damaged without contact. Probe 1. This structure also enables independent adjustment of the distance between the dual probes and the sample. ...

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Abstract

The invention discloses a double-probe same-point measurement scanning probe microscopy which uses an XY or XYZ piezoelectric scanner, and an XY or XYZ piezoelectric scanner which has an enhanced X location range or is additionally provided with XY inertia stepping to deliver a sample measuring point from a first probe to vicinity of a second probe, and realize re-measurement of the second probe to a first probe measurement point by looking for marks. Two independent Z-shaped localizers are used for adjusting the distance between the two probes and the sample, which causes each probe to not interfere the measurement of the other probe. Compared with the same-point measurement technologies of the existing mobile probes, the design is not provided with a degree of long-range freedom, the distance between the two probes is allowed to be longer, and different probes are also allowable, therefore, the control and the fabrication are greatly simplified, and given data are more comprehensive, reliable, significance is wider and deeper, and the scanning probe microscopy is especially suitable for the studies of phase change, reaction kinetics and interdiscipline.

Description

technical field [0001] The invention relates to a scanning double-probe microscope capable of performing measurement and scanning imaging with two independent probes at the same point to be measured on the same sample, and belongs to the technical field of scanning probe microscopes. Background technique [0002] There are many types of scanning probe microscopes (SPM), such as scanning tunneling microscopes (STM), atomic force microscopes (AFM), magnetic force microscopes (MFM), etc., and these different types of scanning probe microscopes have obvious advantages and disadvantages. : STM can measure important quantum information such as electronic density of states, has atomic resolution, and can perform atomic manipulation, but it cannot measure insulating samples, nor can it obtain important information on sample spintronics and magnetism; while AFM Although it can measure insulating samples and has atomic resolution, it cannot give information on electronic density of st...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01Q10/00
Inventor 陆轻铀
Owner UNIV OF SCI & TECH OF CHINA
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