Anti-runout non-collaboration target laser corner and speed measurement method and apparatus

Abstract

The invention belongs to the technical field of optical precision measurement, relating to a non-cooperative target laser corner and speed measuring method and device for radial run-out prevention. The method uses two beams of laser to irradiate the diffuse rotary surface of a rotator and uses the characteristic that doppler shift effect of diffused reflection light irradiated along radial direction is insensitive to radial run-out of the rotator so that high-precision corner measurement is realized by interference detection technique. The measuring device in the invention comprises a laser and further comprises a photoelectric sensor, a convergent mirror, an optical fiber branching device, optical fibers, a frequency shifter, a first circuit of collimating mirror and a second circuit of collimating mirror; the invention uses the optical fibers to construct light paths, thereby reducing the volume of a measuring head; and simultaneously a plurality of measuring heads are installed on the rotary circumference of the rotator, thereby improving harmonic suppression characteristic of a single measuring head by using an error separation technology and eliminating the influence of radial run-out of the rotator on measuring results. The device has the characteristics of small volume, high real-time and good measuring stability.

Description

Anti-runout non-cooperative target laser rotation angle and velocity measurement method and device technical field The invention belongs to the technical field of optical precision measurement, and can measure high-precision angle, angular velocity, and angular acceleration for a rotating body with large radial runout, and provide accurate and fast angle data for realizing high-precision rotation control of a large-scale electromechanical angle system. technical background Rotation angle measurement sensors are widely used in electromechanical systems, especially the acquisition of the rotation angle value of the rotating shaft in large electromechanical turntables, and the motion control of large multi-dimensional turntables are inseparable from rotation angle measurement sensors. However, the angle measurement sensors widely used in electromechanical angle systems, such as grating angle encoders, inductive synchronous angle sensors, and magnetic grid angle measurement sen...

AI Technical Summary

Problems solved by technology

The first purpose of the present invention is to solve the problem that a rotating body with a large radial runout cannot be measured with high precision, and propose a non-cooperative target laser rotation angle and speed measurement method that is resistant to radial runout. This method uses two laser beams to irradiate the rotation The diffuse reflection of the rotating surface of the body, using the Doppler frequency shift effect of the diffuse reflection light emitted in the radial direction, is not sensitive to the radial runout of the rotating body, and then achieves high-precision rotation angle measurement through interference detection technology

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