Auxiliary automatic focusing system and method for optical imaging system

Abstract

The invention discloses an auxiliary automatic focusing system on an optical imaging system and an automatic focusing method for matching with the optical imaging system to realize automatic focusing. An auxiliary automatic focusing device comprises an image receiving device (5) and at least one image analysis and processing system (6); the image receiving device (5) transforms a received optical image signal of an target (7) into an electrical signal which is then transmitted to the image analysis and processing system (6); the image analysis and processing system (6) calculates the divination value of the captured image and gives out the information of the divination value; an object stage (1) moves up and down driven by hand or by the automatic driving device, and stops moving when the gap between the definition value of the image of the target (7) and the maximum definition value is in a permissible range. The auxiliary automatic focusing system can realize automatic focusing without changing the optical and mechanical mechanism of the optical imaging system, can be set according to the demand for different accuracies of focusing and speeds and can adapt to the demands of different cases.

Description

Technical field: [0001] The invention relates to an auxiliary automatic focusing system and an automatic focusing method of an optical imaging system. Background technique: [0002] Since the 1960s, autofocus, as an important automation technology, has been widely used in optical imaging systems such as microscopes, lithography equipment, and testing instruments. [0003] The currently applied automatic focusing system is basically a closed-loop system composed of an image processing device, an image receiving device and a motion control device. The applied automatic focusing method is to use an image processing device to process the image captured by the image receiving device and evaluate the image Sharpness, according to the sharpness of several images to determine the sharpness change function, and then find the position corresponding to the maximum value of the function, the movement control device controls the stage to move to this position (such as a kind of optical i...

AI Technical Summary

Problems solved by technology

If the existing automatic focusing system is applied on it and the existing automatic focusing method is implemented, it will involve the modification of the optical and mechanical structure of the original optical imaging system and the addition of high-value precision motion control devices, which will cost a lot , The transformation is difficult, the transformation period is long, and it will affect the inherent precision of the optical imaging system itself, and the existing automatic focusing system and focusing method cannot set the focusing accuracy and focusing speed according to the needs of different situations

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