An electron column using a magnetic lens layer
A technology of electron column and magnetic lens, applied in nanotechnology, circuit, discharge tube and other directions for information processing, can solve the problem of difficult to precisely control the lens, and achieve the effect of reducing voltage, precise focusing, and easy deflection.
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[0023] With reference to the following figures, various embodiments of the present invention will be described. At this point, it should be noted that various embodiments are used to illustrate the present invention so that those skilled in the art can easily understand the present invention, but are not intended to limit the rights of the present invention.
[0024] image 3 It is a cross-sectional view conceptually showing a section of a lens layer for focusing according to the present invention. Figure 4 To illustrate a cross-sectional view of an embodiment in which an electrode layer using a permanent magnet according to the present invention is used in a source lens. Figure 5 is a top view of a magnetic lens layer according to the present invention. Image 6 It is a top view of the electrode layer of a general electrostatic lens.
[0025] exist image 3 In , the uppermost electrode layer L1 and the lowermost electrode layer L3 are grounded, and the intermediate elec...
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