Optoelectronic hybrid integration sensor device of sulfureted hydrogen gas concentration and test method thereof

Abstract

The invention discloses an optoelectronic hybrid integration sensor device of sulfureted hydrogen gas concentration, which has the characteristics: laser light led out from a laser (1) penetrates through a lens (3) via a polarizer (2), an optical fiber (4) transmits focused polarized light into a gas box (13), the coupling of the optical fiber with a wave guide is realized on an input coupling element (12), the coupled light enters a Mach-Zehnder wave guide interferometer (14), branch wave guides (5 and 19) are respectively connected with a reference arm wave guide (15) and a signal arm wave guide (6) in parallel, the end surface sizes of the two wave guides are determined by mode field matching so as to reduce coupling loss and improve coupling efficiency, a wave guide phase modulator (16) adopts a lumped type wave guide phase modulator structure and is arranged between the reference arm wave guide and the signal arm wave guide, the light interfered by the Mach-Zehnder wave guide interferometer is coupled out of the gas box by an output coupling element (18) to enter a photoelectric signal transforming and processing system and then is led into a photoelectric diode (9) by a lens (7) and an analyzer (8) via the optical fiber, after that, the light intensity is transformed into electric signals to be inputted to a micro signal processor (10), and finally the concentration value of the sulfureted hydrogen gas is obtained by calculation.

Description

technical field [0001] The invention relates to a photoelectric hybrid integrated hydrogen sulfide gas concentration sensor device and a testing method thereof, belonging to the field of on-line monitoring instruments for hydrogen sulfide gas concentration, and is particularly suitable for a photoelectric hybrid integrated gas concentration sensor for polymer optical waveguide and hydrogen sulfide reaction. Background technique [0002] Hydrogen sulfide gas is a highly harmful and highly toxic gas, which can be fatal at low concentrations, and is one of the most toxic pollutants in air pollutants. Hydrogen sulfide gas mainly comes from the production processes of steelmaking, oil refining, papermaking, dyestuffs, pharmaceuticals, and tanning. It has strong corrosion characteristics, severely corrodes production equipment, and affects the health of workers. [0003] Hydrogen sulfide gas is highly toxic and corrosive. Various methods have been used to detect the concentration ...

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Problems solved by technology

[0006] The purpose of the present invention is to provide a photoelectric hybrid integrated hydrogen sulfide gas concentration sensor for the deficiencies of the prior art, which is characterized in that it solves the problems of low signal-to-noise ratio and low sensitivity in low-concentration hydrogen sulfide gas detection technology, and uses optical waveguide to mix Integrated technology makes the photoelectric hybrid integrated hydrogen sulfide gas concentration sensor of the present invention small in size and good in stability

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