Germanium window, method for manufacturing the same, and airtight case with the germanium window

Abstract

A germanium window is composed of a germanium window body (110) and a metallization layer (120), and the metallization layer (120) is sequentially laminated on the lower surface of the edge part based on the germanium window body (110) A bottom layer (10) formed by a gold layer, an intermediate layer (20) and an anti-oxidation outer layer (30) formed by a gold layer, a silver layer or a platinum layer, the intermediate layer (20) being a nickel layer (21)- A sandwich structure of titanium layer, chromium layer or vanadium layer (22)-nickel layer (23). The invention also discloses a manufacturing method of the germanium window and an airtight box with the germanium window. The present invention adds a buffer layer, i.e. a titanium layer, a chromium layer or a vanadium layer (22) in the middle of the nickel layer of the intermediate layer of the metallization layer of the germanium window in the prior art to form a new intermediate layer, i.e. the nickel layer (21)-titanium layer, chromium layer or vanadium layer (22)-nickel layer (23) sandwich structure, so that the new intermediate layer (20) forms an alternating structure of compressive stress and tensile stress inside, avoiding cracking of the intermediate layer.

Description

technical field [0001] The invention relates to a germanium window, a method for manufacturing the germanium window and an airtight box made of the germanium window which can be used as an infrared sensor device and other electronic devices. Background technique [0002] The infrared sensing device is usually made of an airtight box with a germanium window, and its structure is as follows figure 1 The schematic longitudinal section of the uncooled infrared radiation sensor and figure 2 As shown in the top view of the uncooled infrared radiation sensor, it includes a germanium window 1, a metal cover plate 12, a chip 13 and a metal shell 14, wherein the germanium window 1, the metal cover plate 12 and the metal shell 14 constitute an airtight box body. Materials used for infrared transmission windows generally include silicon, germanium, zinc selenide, BK7, sapphire, etc. The germanium window described in this application is used as an infrared transmission window. Infra...

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Problems solved by technology

[0009] According to these four schemes, the adhesion between the metallization layer laminated on the lower surface of the germanium window 1 and the body of the germanium window 1 is not high, and there are cracks. After welding and packaging with the metal cover plate 12, air leakage occurs. Moreover, the thickness of the Pd layer in the third scheme is too thick (>10μm), and the fourth scheme uses pure gold (thickness>300nm), and the cost is too high

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