Double probe micro nanometer mechanics detecting system

Abstract

The invention belongs to the technical field of micro nanometer level detecting equipment, in particular to a double probe micro nanometer mechanics detecting system. A frame is installed in a bottom plate, the frame is provided with a precision one-dimensional platform and is adjusted by a button of the platform; one end of the precision one-dimensional platform is connected with a slide block, and a slide rail is installed below the slide block; the two sides of the slide rail are respectively provided with a piezoelectric ceramic; one end of a first probe fixing frame is installed on the frame and the other end is connected with a first probe, and a second probe fixing frame is installed on the frame and the other end is connected with a second probe; and the frame is provided with a first reflector, a second reflector, a laser, a PSD detector and a piezoelectric ceramic interface. The system can realize the detection of load, clamp, micro force and micro deformation, and can complete the micro nanometer mechanics experiment detection of the extension, the compression, the bend, the vibration, the fatigue, and the like, of material and structure, wherein sample size can be from micrometer to submicron degree, and the measurement range of the micro force is from nano Newton to micro Newton degree.

Description

technical field [0001] The invention belongs to the technical field of micro-nano level detection equipment, and in particular relates to a double-probe micro-nano mechanical detection system. Background technique [0002] The scale range of micro-nano technology is 1nm-100μm. The study of the mechanical properties of materials and structures in this scale range requires some specific observation, characterization and detection systems, such as scanning electron microscope (SEM), transmission electron microscope (TEM), atomic force microscope (AFM), etc. . However, SEM, TEM and other equipment are mainly used to observe the micro-nano structure and the morphology of materials and the structural properties of materials at the beginning of design, and do not involve too much measurement of mechanical properties. Therefore, up to now, there are few micro-nano measurement equipment based on scanning probe microenvironment platform specially designed for mechanical research, es...

AI Technical Summary

Problems solved by technology

For example, there are still difficulties in the experimental verification of the existing micro-nano mechanical theory and calculation model; the existing SEM, TEM and AFM and other equipment can achieve nanoscale observation, but cannot meet the needs of mechanical measurement; micro-nano scale mechanical properties Measurement requires clamping, loading, and high-precision detection of micro-force and deformation for tiny specimens.

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