Continuous surface vacuum coater of metal sheet strip

Abstract

The invention relates to a continuous surface vacuum coater of a metal sheet strip, belonging to the field of surface physical vapor deposition of metal sheet strips under the vacuum condition. The continuous surface vacuum coater comprises a decoiling machine set (10) and is mainly characterized in that vacuum coating chambers comprise 1-5 A low-vacuum chambers (20a), 1-3 ionic processing chamber(30), 1-5 B low-vacuum chamber (40), 2-9 high-vacuum chamber (50), 1-8 coating chambers (60) and 1-5 A low-vacuum chambers (20b); the chambers are closely connected by flanges and provided with windows (2) on which a metal sheet strip (1) passes through; all vacuum chambers are connected with a vacuum machine set (90); and a coiling machine set (80) and a continuous-coating control system (100) are also arranged outside the vacuum coating chambers. The device has the advantages that: multilayer films and reaction films can be coated on the metal sheet strip, the thickness of the film layer can be controlled independently, the film layer is even and compact, the adhesion force is strong, the process repeatability is good, the production efficiency is high, and the industrial production isapplicable.

Description

technical field [0001] The invention relates to the field of physical vapor deposition on the surface of metal thin strips under vacuum conditions. Background technique [0002] At present, the continuous treatment of the surface of metal sheet strips in China adopts the form of thermal coating. This method has the following disadvantages: (1) The melting point temperature of the coating material is low, and materials with high melting point cannot be coated; (2) The coating is thick, And it can only be coated on both sides at the same time; (3) only a single material can be coated; (4) the color, uniformity and adhesion of the coating are poor. The steel strip produced can only be used in the low-end market. In order to make up for the shortcomings of the thermal coating process, intermittent vacuum electron beam evaporation, vacuum magnetron sputtering, vacuum multi-arc ion coating equipment, etc. have been developed in China before, but these equipment have the following...

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Problems solved by technology

[0002] At present, the continuous treatment of the surface of metal sheet strips in China adopts the form of thermal coating. This method has the following disadvantages: (1) The melting point temperature of the coating material is low, and materials with high melting point cannot be coated; (2) The coating is thick, And it can only be coated on both sides at the same time; (3) only a single material can be coated; (4) the color, uniformity and adhesion of the coating are poor

In order to make up for the shortcomings of the thermal coating process, intermittent vacuum electron beam evaporation, vacuum magnetron sputtering, vacuum multi-arc ion coating equipment, etc. have been developed in China before, but these equipment have the following disadvantages: The time taken by the strip is relatively long, and the vacuum chamber door must be opened to load and unload the strip every time a coil is plated. The production efficiency is low and it is not suitable for industrial continuous production; (2) It is difficult to ensure consistent coating parameters in each cycle, and the product quality consistency is poor; (3 ) The magnetron target or multi-arc source has a certain degree of oxidation and pollution after exposure to the atmosphere, which affects the quality of the film

The price of importing such equipment is very expensive, and with the development of my country's national economy, the demand for vacuum coating products on steel strips has increased greatly. Therefore, it is urgent to develop such equipment

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