Continuous surface vacuum coater of metal sheet strip

A metal thin plate and vacuum coating technology, which is applied in vacuum evaporation coating, metal material coating process, sputtering coating, etc., can solve the problems of difficulty in ensuring consistency of coating parameters, pollution, coating thickness, etc., and achieve rich man-machine The effect of good interface and film quality and high coating efficiency
CN101649448AActive Publication Date: 2010-02-17兰州大成科技股份有限公司 +2
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
兰州大成科技股份有限公司
Publication Date
2010-02-17

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Abstract

The invention relates to a continuous surface vacuum coater of a metal sheet strip, belonging to the field of surface physical vapor deposition of metal sheet strips under the vacuum condition. The continuous surface vacuum coater comprises a decoiling machine set (10) and is mainly characterized in that vacuum coating chambers comprise 1-5 A low-vacuum chambers (20a), 1-3 ionic processing chamber(30), 1-5 B low-vacuum chamber (40), 2-9 high-vacuum chamber (50), 1-8 coating chambers (60) and 1-5 A low-vacuum chambers (20b); the chambers are closely connected by flanges and provided with windows (2) on which a metal sheet strip (1) passes through; all vacuum chambers are connected with a vacuum machine set (90); and a coiling machine set (80) and a continuous-coating control system (100) are also arranged outside the vacuum coating chambers. The device has the advantages that: multilayer films and reaction films can be coated on the metal sheet strip, the thickness of the film layer can be controlled independently, the film layer is even and compact, the adhesion force is strong, the process repeatability is good, the production efficiency is high, and the industrial production isapplicable.
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Description

technical field

[0001] The invention relates to the field of physical vapor deposition on the surface of metal thin strips under vacuum conditions. Background technique

[0002] At present, the continuous treatment of the surface of metal sheet strips in China adopts the form of thermal coating. This method has the following disadvantages: (1) The melting point temperature of the coating material is low, and materials with high melting point cannot be coated; (2) The coating is thick, And it can only be coated on both sides at the same time; (3) only a single material can be coated; (4) the color, uniformity and adhesion of the coating are poor. The steel strip produced can only be used in the low-end market. In order to make up for the shortcomings of the thermal coating process, intermittent vacuum electron beam evaporation, vacuum magnetron sputtering, vacuum multi-arc ion coating equipment, etc. have been developed in China before, but these equipment have the following...

Claims

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