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Method and apparatus for manufacturing vitreous silica crucible and vitreous silica crucible

一种石英玻璃坩埚、制造方法的技术，应用在玻璃制造设备、玻璃的成型、制造工具等方向，达到防止过剩的加热、增大输出、增多电极根数的效果

Active Publication Date: 2010-05-26
SUMCO CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, as mentioned above, an electrode structure capable of easily controlling the characteristics of the inner surface of the crucible is still unknown, and there is a need to improve the uniformity of crucible quality (characteristics) based on the experience of skilled persons.

Method used

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  • Method and apparatus for manufacturing vitreous silica crucible and vitreous silica crucible
  • Method and apparatus for manufacturing vitreous silica crucible and vitreous silica crucible
  • Method and apparatus for manufacturing vitreous silica crucible and vitreous silica crucible

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0138] [Example 1] According to the rotational molding method, the quartz powder formed from the outer peripheral layer of the crucible to the inner peripheral layer was pre-stacked in the rotary mold, and the three-phase AC 6 electrodes of the present invention were used, and the existing three-phase AC 3 electrodes (Comparative Example 1) and 6-phase AC 6 electrodes (Comparative Example 2) each electrode structure, the distance between the electrodes was changed, the quartz powder was heated and melted, and a 32-inch quartz glass crucible was manufactured. The results are shown in Table 1. In the electrode structure of Comparative Example 1, when the expansion degree of the electrode, that is, the circumferential diameter of the disposed electrode is 81 mm, arc disconnection occurs frequently, and when the expansion degree of the electrode becomes larger than this, the arc cannot be generated. In addition, in the electrode structure of Comparative Example 2, although the exte...

Embodiment 2

[0142] [Example 2] In the manufacture of a vitreous silica crucible based on the rotational molding method, a vitreous silica crucible with a diameter of 32 inches used the 3-phase AC 6 electrodes of the present invention (Example) and the existing 6-phase AC In the electrode structure of 6 electrodes (Comparative Example 2) (the diameter of the circumference of the electrode is 243 mm), the electric power of 1000 KW was energized for 20 minutes, and the arc was generated 5 times, and the stability of the arc was investigated. The results are shown in Table 2. In the electrode structure of the present embodiment, the arc is stable, and even if the electric energy used in each time is approximately constant, in Comparative Example 2, the electric energy used in each time fluctuates greatly because the arc is unstable.

[0143] [Table 2]

[0144] Number of arcs

[0145] Number of arcs

Embodiment 3

[0146] [Example 3] In the manufacture of a quartz glass crucible based on the rotational molding method, for crucibles with a diameter of 22 to 40 inches, the 3-phase AC 6 electrodes of the present invention were used, and the conventional 3-phase AC 3 electrodes ( In Comparative Example 1), each electrode structure of 6-phase AC 6 electrodes (Comparative Example 2), the distance between the electrodes was changed, and electric power of 1000 kW was applied to generate an arc, and the stability was investigated. The results are shown in Table 3.

[0147] [table 3]

[0148] Crucible diameter

[0149] (Note) The diameter of the circumference is the diameter of the circumference where the electrode is placed, and it is 1 / 4 of the crucible hole diameter.

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Abstract

A method of manufacturing a fused silica crucible by heating and melting a vitreous silica powder compact shaped into a mold using are discharge of electrodes arranged around a rotation shaft of the mold, includes the steps of: arranging the electrodes in a ring shape, and setting a ratio W / R of a horizontal distance W between the electrode front end and the surface of the vitreous silica powder compact to a vitreous silica powder compact opening radius R, for at least a predetermined time during arc heating, to be in the range of 0.002 to 0.98.

Description

Technical field [0001] The present invention relates to a method and device for manufacturing a quartz glass crucible, and a quartz glass crucible, and also relates to a suitable technique used in arc melting suitable for the manufacture of large-caliber crucibles. [0002] This application claims priority based on Japanese Patent Application No. 2008-244521 filed on September 24, 2008, and the content is cited here. Background technique [0003] The method of manufacturing a quartz glass crucible based on the rotational molding method is to heat and melt the quartz powder accumulated on the inner side of the rotary mold by arc discharge to produce a quartz glass crucible with a transparent layer on the inner side and an opaque layer on the outer side. The structure of the electrode forming the arc discharge uses three electrodes in the prior art, and a three-phase alternating current is passed through the electrodes to form an arc (discharge) plasma between the electrodes. The abo...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C03B20/00C30B15/10
CPCC30B35/002C30B15/10C30B11/002C03B19/095Y10T117/10Y10T117/1024Y10T117/1032Y10T117/1068Y10T117/1072C03B20/00
Inventor 岸弘史福井正德森川正树
Owner SUMCO CORP
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