Substrate cleaning chamber and components

Abstract

A substrate cleaning chamber comprises various components, such as for example, a consumable ceramic liner, substrate heating pedestal, and process kit. The consumable ceramic liner is provided for connecting a gas outlet channel of a remote gas energizer to a gas inlet channel of a substrate cleaning chamber. The substrate heating pedestal comprises an annular plate having a substrate receiving surface with a plurality of ceramic balls positioned in an array of recesses. A process kit comprises a top plate, top liner, gas distributor plate, bottom liner, and focus ring.

Description

technical field [0001] The present invention relates to substrate cleaning chambers and components thereof. Background technique [0002] In substrate processing such as semiconductors and displays, layers are formed on the substrate and then etched to form features such as conductive interconnects, contacts, vias, gates and barriers. For example, an electrical interconnect can be patterned by depositing a metal-containing conductor on the substrate, forming a patterned etch-resistant material on the conductor, etching the conductor to form the interconnect, removing residual photoresist, and The etched features are fabricated by depositing a dielectric layer. The dielectric layer may be further etched to form contact holes or vias that expose underlying metal-containing conductive material or other substrate layers. Conductive material is then deposited into the etched holes or trenches to electrically contact the underlying conductors. For example, in the formation of c...

AI Technical Summary

Problems solved by technology

This corrosion damages the components, and if the component is an integral part of the chamber, the chamber must be closed so that the component can be refurbished or replaced after a predetermined number of process cycles, which is not ideal

Known stainless steel walls and liners are particularly susceptible to corrosion requiring frequent replacement or refurbishment

[0007] Yet another problem occurs when the substrate heating pedestal that contacts the substrate within the cleaning chamber transfers contaminants and process residues and deposits to the back of the substrate or even scratches the substrate during the substrate transfer process

Substrate heating mounts that contain heating elements may also provide uneven heating across the surface of the substrate

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