Vacuum negative pressure gas-static super-precision guide rail

Abstract

The invention discloses a vacuum negative pressure gas-static super-precision guide rail structure, which belongs to the technical field of precision measurement, super-precision machining, micro machinery, nano technology and the like. A guide rail is fixed on the upper surface of a base through a guide rail cushion; a slide block encircles the guide rail, and a compressed air film gap is formed between the two lateral surfaces of the guide rail and the inner lateral surface of the slide block so as to form a static air floating state; and the lower bottom surface of the slide block is provided with a compressed air flow pore and a vacuum cavity, and a vacuum adsorption airflow hole is formed in the slide block. The guide rail structure is characterized in that the slide block has a symmetrical closed structure according to design, and the vacuum cavity and the slide block have the same symmetrical centre line; the compressed air film gap is formed between the slide block and the upper surface of the base; the size of the gap between the upper surface of the guide rail and the inner upper surface of the slide block is c, and the size of the gap between the lower surface of the guide rail and the inner lower surface of the slide block is d; and the c and the d are not smaller than the deformation amount caused by weight of the guide rail. The guide rail has the advantages of high guide precision, good precision retention and high rigidity.

Description

technical field [0001] The invention relates to an ultra-precision guide rail and a positioning technology and device, and belongs to the technical fields of precision measurement, ultra-precision machining, micro-machines and nanotechnology. Background technique [0002] Precision guide rails are the foundation and key of precision positioning systems. Due to its high precision and cleanliness, the gas static pressure precision guide rail has been widely used in the technical fields of modern precision measurement, ultra-precision machining, micro-mechanics and nanotechnology. There are two types of gas static pressure precision guide rails: closed type and open type. [0003] The principle of the existing closed gas hydrostatic guideway is as follows: Figure 1a and Figure 1b shown. Figure 1a and Figure 1b Among them, 1 is the slider, 2 is the guide rail, and 3 is the guide rail pad. The slider 1 floats on the guide rail 2 through the compressed gas film to form a c...

AI Technical Summary

Problems solved by technology

[0007] The existing vacuum negative pressure gas static pressure guide rail and magnetic adsorption gas static pressure precision guide rail, due to the non-closed structure of the slider, the stiffness of the slider is low, and the deformation of the slider results in poor precision retention of the guide rail.

The existing vacuum negative pressure gas static pressure guide rail cannot guarantee thermal symmetry, and the thermal deformation has a great influence on the guiding accuracy

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