A vacuum negative pressure gas static pressure ultra-precision guide rail

Abstract

A vacuum negative pressure gas static pressure ultra-precision guideway structure belongs to the technical fields of precision measurement, ultra-precision processing, micro-machines, nanotechnology and the like. The guide rail is fixed on the upper surface of the base through the guide rail pad; the slider surrounds the guide rail, and there is a compressed gas film gap between the two sides of the guide rail and the inner surface of the slider, forming a static pressure air floatation state; the lower bottom surface of the slider There are small holes for compressed gas flow and a vacuum chamber, and there are vacuum adsorption airflow holes in the slider; it is characterized in that: the slider is designed as a symmetrical closed structure, and the vacuum chamber and the slider have the same symmetrical centerline; the slider and the base There is a compressed gas film gap between the upper surface; the gap size between the upper surface of the guide rail and the inner upper surface of the slider is c, and the gap size between the lower surface of the guide rail and the inner lower surface of the slider is d; c and d are not less than the guide rail itself The amount of deformation due to weight. The guiding precision of the guide rail is high, the precision retention is good, and the rigidity is high.

Description

technical field [0001] The invention relates to an ultra-precision guide rail and a positioning technology and device, and belongs to the technical fields of precision measurement, ultra-precision machining, micro-machines and nanotechnology. Background technique [0002] Precision guide rails are the foundation and key of precision positioning systems. Due to its high precision and cleanliness, the gas static pressure precision guide rail has been widely used in the technical fields of modern precision measurement, ultra-precision machining, micro-mechanics and nanotechnology. There are two types of gas static pressure precision guide rails: closed type and open type. [0003] The principle of the existing closed gas hydrostatic guideway is as follows: Figure 1a and Figure 1b shown. Figure 1a and Figure 1b Among them, 1 is the slider, 2 is the guide rail, and 3 is the guide rail pad. The slider 1 floats on the guide rail 2 through the compressed gas film to form a c...

AI Technical Summary

Problems solved by technology

[0007] The existing vacuum negative pressure gas static pressure guide rail and magnetic adsorption gas static pressure precision guide rail, due to the non-closed structure of the slider, the stiffness of the slider is low, and the deformation of the slider results in poor precision retention of the guide rail.

The existing vacuum negative pressure gas static pressure guide rail cannot guarantee thermal symmetry, and the thermal deformation has a great influence on the guiding accuracy

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