Motion sensing method and motion sensing device using the same
A technology of motion sensing and light sensing, which is applied to devices that measure the time required to move a certain distance, measuring devices, and acceleration measurements using inertial force. It can solve the problems of difficult assembly, complex optical design, and difficulty in maintaining high Sensitivity and other issues
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[0119] In order to have a further understanding and understanding of the structural features of the present invention and the achieved effects, the preferred embodiments and accompanying drawings are used for a detailed description, as follows:
[0120] figure 1A schematic side sectional view of a motion sensing device 100 according to an embodiment of the present invention is shown. The motion sensing device 100 disclosed in an embodiment of the present invention is a micro-electro-mechanical device, which includes a light sensing device 102 , a proof mass 104 , and a light source 106 . The photo-sensing element 102 is formed on a substrate 108 for sensing an irradiating light. The light source 106 is disposed above the light-sensing component 102 and faces the light-sensing component 102 , so that the irradiated light generated by it can be directed to the light-sensing component 102 . The mass block 104 is a movable part in a micro-electro-mechanical component, which can ...
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