Closed hydrostatic slideway

Abstract

The invention provides a closed hydrostatic slideway which comprises a base and a sliding block arranged on the base. The upper surface of the base is provided with a horizontal supporting slideway and a vertical supporting slideway in sequence from bottom to top; the sliding block is inlaid in a groove formed by the base, the horizontal supporting slideway and the vertical supporting slideway; a hydrostatic oil cavity is arranged between the upper surface of the sliding block and the lower surface of the vertical supporting slideway; a hydrostatic oil cavity is arranged between the lower surface of the sliding block and the upper surface of the base; and a hydrostatic oil cavity is arranged between the side surface of the sliding block and the side surface of the horizontal supporting slideway. In the closed hydrostatic slideway, a groove structure with a certain depth-to-width ratio is not adopted, and all main precision surfaces are all of a plane structure and can be ground, thereby reducing the processing difficulty of the slideway. Meanwhile, since the slideway and the base are both made of granite materials with good heat stability, the precision of the slideway is ensured. The straightness error of the closed hydrostatic slideway can be 0.1 mu m / 100mm, and the rigidities of the slideway in horizontal and vertical directions are both larger than 10000N / mu m.

Description

technical field [0001] The invention relates to a closed static pressure guide rail, in particular to a high precision and high rigidity closed static pressure guide rail suitable for ultra-precision machine tools. Background technique [0002] Ultra-precision machine tools require the guide rail to have extremely high manufacturing accuracy, and at the same time require the coupling surface to be free of friction and wear. Based on the above requirements, hydrostatic guide rails are widely used in the design of ultra-precision machine tools. According to the form of the guide rail, the structural form of the static pressure guide rail can be divided into two types: open type and closed type. The planar closed type static pressure guide rail can withstand loads and overturning moments in all directions, and has the characteristics of strong bearing capacity, high precision and high rigidity. The existing planar closed guide rails mostly adopt an integrated structure, and it ...

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Problems solved by technology

[0003] The invention patent "A Hydrostatic Guide Rail Adopting Multi-head Quantitative Pump" (publication number: CN 1884861A) discloses a closed static pressure guide rail with a slide block on the guide rail. The guide rail adopts an integrated structure, and it needs to be processed at the same time Guarantee the parallelism of the upper and lower horizontal guide surfaces, the distance dimension accuracy, and the perpendicularity between the horizontal guide surface and the vertical guide surface. In general processing, the method of grinding first and then repairing is required to ensure the accuracy of the guide rail. There are great difficulties in the groove structure with a certain aspect ratio, which objectively limits the accuracy that this type of guide rail can achieve

[0004] The invention patent "A Closed Static Pressure Guide Rail and Its Manufacturing Method" (publication number: CN1763389A) discloses a closed static pressure guide rail in which the slider covers the guide rail. The guide rail adopts a combined structure. Composition, during processing, it is difficult to repair the lower horizontal guide surface of the main body of the guide rail. In addition, the horizontal slider of this structure also belongs to the groove structure with a certain depth-to-width ratio, so it is also difficult to repair and research. Therefore, the guide rail of this type The accuracy is objectively limited to a certain extent

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