Excimer lamp
An excimer lamp, a part of the technology, is applied in the field of excimer lamps for lighting openings, which can solve the problems of inability to correctly measure the amount of light, obstruction of creeping discharge 12, etc., and achieve the effect of easy formation and easy lighting openings
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[0032] figure 1 Is a schematic diagram showing the first embodiment of the excimer lamp of the present invention, figure 1 (a) is a top view, and figure 1 (b) is its B-B sectional view.
[0033] In the figure, on the monolithic electrode (べタ-shaped electrode) 3 formed at the end of the light-transmitting electrode 2, the upper and lower ends thereof are integrally formed and extend in the direction opposite to the light-transmitting electrode in the tube axis direction. The branch electrodes 8,8.
[0034] In addition, a starting auxiliary electrode 6 is formed so as to overlap a part of the inner surface of the discharge vessel 11 corresponding to the portion where the branch electrode 8 is formed. For other structures, and image 3 The same as shown.
[0035] The branch electrodes 8, 8 have the effect of increasing the distance L between the lighting port 5 and the starting auxiliary electrode 6, so even if the lighting port 5 is arranged near the end of the excimer lamp that has...
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