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Substrate elevating transferring device and substrate processing transferring system

A technology of transfer device and substrate processing device, which is applied in the direction of conveyor objects, transportation and packaging, electrical components, etc., can solve the problems of difficult effective use of space, increase of plane area occupied by substrate lifting and transfer devices, etc., to achieve effective utilization, Reduce the occupation of the plane area and realize the effect of space

Active Publication Date: 2010-10-06
IHI CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Therefore, the floor area occupied by the substrate lifting and transferring device increases, making it difficult to effectively use the space in the factory.

Method used

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  • Substrate elevating transferring device and substrate processing transferring system
  • Substrate elevating transferring device and substrate processing transferring system
  • Substrate elevating transferring device and substrate processing transferring system

Examples

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Embodiment Construction

[0031] refer to Figure 1 to Figure 7 One embodiment of the present invention will be described. In addition, in the drawings, "FF" indicates a front direction, "FR" indicates a rear direction, "L" indicates a left direction, and "R" indicates a right direction.

[0032] Such as figure 1 As shown, the substrate processing transfer system 1 of the present embodiment is a system that performs transfer processing (processing of substrates) and elevating transfer of substrates W such as glass substrates. Further, the substrate processing transfer system 1 includes: a first substrate transfer processing device (first substrate processing device) 3 installed on the lower floor LF to perform transfer processing of the substrate W; A second substrate transfer processing device (second substrate processing device) 5 ; and a substrate lift transfer device 7 for lifting and transferring the substrate W between the first substrate transfer processing device 3 and the second substrate tr...

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Abstract

In a substrate elevating transferring device, a first posture shifting member having a first posture shifting maintenance member is arranged on one side of a first substrate processing device in a way shaking around a horizontal axle center; a second posture shifting member having a second posture shifting maintenance member is arranged on one side of a second substrate processing device in a way shaking around a horizontal axle center; a circular member which extends along the vertical direction in a circulation walking way is vertically arranged on a supporting frame on one side of the first posture shifting member; and a plurality of elevating maintenance members are arranged on the circumference direction of the circular member at an interval. The substrate elevating transferring device can sufficiently reduce the plane area occupation and effectively use the space in the factory.

Description

technical field [0001] The invention relates to a substrate lifting and transferring device and a substrate processing and transferring system used in the fields of cleaning material handling and the like. Background technique [0002] In the field of clean transportation, a substrate elevating transfer device is used that elevates and transfers substrates such as glass substrates between a first substrate processing device disposed on a lower floor and a second substrate processing device disposed on an upper floor. The structure and the like of a general substrate elevating and transferring device are as follows. [0003] That is, near the first substrate processing apparatus, an elevating guide portion extending in the vertical direction is provided, and an elevating table for supporting the substrate is provided on the elevating guide portion so as to be able to ascend and descend. In addition, an elevating motor for elevating the elevating table is provided at an appro...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/677H01L21/687
Inventor 和田芳幸石桥希远
Owner IHI CORP
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