Mask knife edge moving device of photo-etching machine

Abstract

The invention discloses a mask knife edge moving device of a photo-etching machine. The device adopts a structure with a double-layer unit and two groups of independent assemblies, and consists of an X-direction slit knife edge moving device and a Y-direction slit knife edge moving device with the same structures; the X-direction slit knife edge moving device realizes X-direction left and right independent translation, and the Y-direction slit knife edge moving device realizes Y-direction up-and-down independent translation; the X-direction slit knife edge moving device and the Y-direction slit knife edge moving device are assembled and superposed to realize the X-direction left and right translation and the Y-direction up-and-down translation respectively; and the X-direction slit knife edge moving device or the Y-direction slit knife edge moving device consists of two blade clips, two precision ball screws, two screw nuts, two drive rods, two motors, two couplings, two gratings, a computer and a mask table. The device can realize an illumination area of a mask at different positions and with automatic control and adjustment of shape and size.

Description

technical field [0001] The invention relates to a mask knife edge moving device of a lithography machine, which belongs to the technical field of lithography machines. technical background [0002] In the lithography machine, it is often necessary to uniformly illuminate different positions or different shape areas on the mask, which can improve the uniformity of illumination and the flexibility of production and processing, and more importantly, greatly improve the quality of lithography. However, the original The current lithography machine does not have the illumination area selection function that can automatically control and adjust the different positions of the mask and the size and shape. Contents of the invention [0003] The technical problem of the present invention is: to overcome the deficiencies of the prior art, to provide a mask knife-edge moving device for photolithography machine, to realize the uniform illumination area selection in which the mask is in ...

AI Technical Summary

Problems solved by technology

[0002] In the lithography machine, it is often necessary to uniformly illuminate different positions or different shape areas on the mask, which can improve the uniformity of illumination and the flexibility of production and processing, and more importantly, greatly improve the quality of lithography. However, the original The lithography machine does not have this kind of illumination area selection function that can automatically control the size and shape of different positions of the mask

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