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Heater block of rapid thermal process apparatus

A rapid heat treatment and heater technology, applied in the direction of heating elements, ohmic resistance heating devices, ohmic resistance heating parts, etc., can solve problems such as difficult to rearrange heating lamps, uneven heating of substrates, difficult to maintain and repair heater units, etc. , to achieve easy maintenance and repair, prevent heat damage, and prevent uneven heating

Inactive Publication Date: 2010-12-15
AP SYST INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

These baffles are used as a secondary indirect heat source and thus cause uneven heating of the substrate
[0005] Conventional rapid thermal processing apparatuses cause problems such as difficulty in maintaining and repairing the heater unit due to its integral formation, difficulty in rearranging heat lamps, and uneven heating of the substrate due to difficulty in cooling

Method used

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  • Heater block of rapid thermal process apparatus
  • Heater block of rapid thermal process apparatus

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Embodiment Construction

[0017] Now, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. The following embodiments are only described for a better understanding of the present invention. Those skilled in the art should understand that without departing from the scope and spirit of the present invention disclosed in the appended claims, they can Various improvements are made to the embodiment.

[0018] figure 1 It is a schematic diagram illustrating the heater unit of the rapid thermal processing apparatus according to the present invention. Reference figure 1 The heater unit of the present invention includes a lamp cover 50, a socket cover 30 and a reflector cover 60 that are detachably connected.

[0019] The lamp cover 50 is formed in a flat plate shape, and a plurality of lamp insertion holes are formed vertically through the lamp cover 50. The socket cover 30 covers the upper surface of the lamp cover 50.

[0020] With the O-ring 38...

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Abstract

Disclosed is a separation type heater block of a rapid thermal processing apparatus, including a lamp housing formed in a plate shape, and provided with a plurality of lamp insertion holes, into which heating lamps are respectively inserted; a socket housing, into which sockets of the heating lamps are inserted, separably covered on the lamp housing; and a reflector housing provided with light emission holes at positions corresponding to the lamp insertion holes, separably installed under the lamp housing such that lower ends of the heating lamps are respectively inserted into the light emission holes, side walls of the light emission holes serving as barriers, wherein a cooling water channel, through which cooling water flows, is formed through the side walls of the light emission holes of the reflector housing.

Description

Technical field [0001] The present invention relates to a heater unit of a rapid thermal processing device, and more particularly, to a separate heater unit. Background technique [0002] The key to rapid thermal processing (RTP) is to quickly heat the substrate to the required temperature in a short time. The rapid heating is performed under the condition that the substrate is uniformly heated. Various ways of arranging heating lamps to uniformly heat the substrate have been proposed. However, since the heater unit is integrally formed, it is practically impossible to rearrange the heating lamps according to changes in the process. [0003] In addition, the heater unit consumes a large amount of energy and therefore becomes a main component of the rapid thermal processing device. However, since the heater unit is integrally formed, if the parts of the heater unit are damaged due to heat or a malfunction caused by other reasons, the parts cannot be simply replaced with new parts...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H05B3/06
CPCH01L21/67115H05B3/0033H05B3/06
Inventor 沈长禹金昇龙许俊黄大天
Owner AP SYST INC
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