Valve plate driving mechanism of sealing cavity

Abstract

The invention discloses a valve plate driving mechanism of a sealing cavity, comprising a movable guiding device, a mounting plate, a first driving device, a connecting device and a second driving device. The movable guiding device is arranged below a transferring window of the sealing cavity and fixedly connected with the outer side wall of the sealing cavity, the mounting plate is longitudinally and glidingly connected with the movable guiding device and fixedly connected with the first driving device, and the connecting device is respectively connected with a valve plate and the second driving device which is respectively connected with the connecting device and the mounting plate. The valve plate driven by the first driving device of the valve plate driving mechanism of the sealing cavity through the mounting plate to make longitudinal linear reciprocating motion and driven by the second driving device to make transversal linear reciprocating motion so as to realize the process ofopening or closing the transferring window through the valve plate and have the advantages of simple and compact structure, flexible and convenient action, very simple processing and operation of spare parts, easy implementation and lower equipment configuration cost.

Description

technical field [0001] The invention relates to a sealed cavity used for providing a vacuum environment in the field of vacuum coating, and more particularly relates to a valve plate driving mechanism for opening or closing a transfer window of the sealed cavity. Background technique [0002] In the organic light emitting diode (English: Organic Light Emitting Diode, referred to as: OLED) industry and the solar panel industry, a large number of substrates need to be coated, and the sealed cavity (also called, vacuum chamber) required for coating body) is essential. In order to facilitate the input of the substrate to be coated into the sealed cavity from the outside or the output of the coated substrate from the sealed cavity, a transfer window for the substrate to enter and exit is usually set on the sealed cavity, and through the The valve plate is used to realize the opening or closing of the above-mentioned transfer window. [0003] In the prior art, a worm gear valve ...

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Problems solved by technology

[0005] However, the structure of the worm gear valve plate driving device is relatively complicated, and the processing, operation and maintenance of parts are relatively complicated, which is difficult to implement and the cost of equipment configuration is relatively high.

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