Continuous multiple sputter coating chamber atmosphere isolation system

A sputtering coating and isolation system technology, which is applied in the field of vacuum coating, can solve the problems of increased manufacturing cost, mixing of working gas, and affecting the quality of coating, and achieve the effect of reducing loss

Inactive Publication Date: 2011-02-02
深圳市锦瑞新材料股份有限公司
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  • Abstract
  • Description
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  • Application Information

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Problems solved by technology

The intermediate link not only increases the manufacturing cost, but also easily oxidizes or pollutes the object to be plated in the intermediate link, which directly affects the coating quality
The main reason for adopting this method is that t

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  • Continuous multiple sputter coating chamber atmosphere isolation system
  • Continuous multiple sputter coating chamber atmosphere isolation system
  • Continuous multiple sputter coating chamber atmosphere isolation system

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[0021] The present invention will be described in further detail below with reference to the accompanying drawings.

[0022] reference figure 1 , The first embodiment of the present invention is a continuous multi-chamber sputtering and coating room atmosphere isolation system, including two sputtering chambers, namely the first sputtering chamber 101 and the second sputtering chamber 103; The transition chamber 102 is arranged between the first sputtering chamber 101 and the second sputtering chamber 103; between the first sputtering chamber 101 and the transition chamber 102 is provided for plating The first channel 104 through which the object continuously passes, the transition chamber 102 and the second sputtering chamber 103 have a second channel 105 for continuous passage of the object to be plated; the transition chamber 102 is connected to a vacuum generator 109, so The vacuum degree of the transition chamber 102 is greater than the vacuum degree of the first sputtering ...

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Abstract

The invention relates to vacuum coating technology, in particular to a continuous multiple sputter coating chamber atmosphere isolation system, which comprises at least two sputtering chambers, namely a first sputtering chamber and a second sputtering chamber, and also comprises a transition chamber arranged between the first sputtering chamber and the second sputtering chamber. A first channel for an object to be coated continuously pass is formed between the first sputtering chamber and the transition chamber; a second channel for an object to be coated continuously pass is formed between the transition chamber and the second sputtering chamber; the transition chamber is connected with a vacuum generating device; the vacuum degree of the transition chamber is greater than that of the first sputtering chamber, and the vacuum degree of the transition chamber is also greater than that of the second sputtering chamber; the transition chamber is also provided with air inlets and air outlets which are formed between the first channel and the second channel; and air flows through the air inlets and flows into the air outlets to form an air curtain between the first channel and the second channel. The invention provides a continuous multiple sputter coating chamber atmosphere isolation system so as to realize continuous multiple chamber multiple atmosphere coating.

Description

technical field [0001] The invention relates to vacuum coating technology, in particular to a continuous multi-chamber sputtering coating room atmosphere isolation system. Background technique [0002] Sputtering technology is the main method of vacuum coating. In the existing technology, multiple sputtering is involved, and discontinuous sputtering is generally used, and transfer and storage links are required in the middle. The intermediate link not only increases the manufacturing cost, but also the object to be plated is easily oxidized or polluted in the intermediate link, which directly affects the coating quality. The main reason for adopting this method is that the existing vacuum sputtering equipment cannot realize continuous operation. The working gas and vacuum degree of different sputtering chambers are different, and continuous operation will lead to the mixing of working gas and the failure of coating. [0003] The working gas referred to in the present invent...

Claims

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Application Information

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IPC IPC(8): C23C14/34C23C14/56
Inventor 金烈
Owner 深圳市锦瑞新材料股份有限公司
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