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Method for machining micro-mechanical quartz tuning fork gyro sensitive structure

A quartz tuning fork and sensitive structure technology, applied in the direction of microstructure technology, microstructure device, manufacturing microstructure device, etc., can solve the problems that cannot meet the accuracy requirements

Active Publication Date: 2011-04-13
BEIJING AUTOMATION CONTROL EQUIP INST
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Problems solved by technology

[0018] The material of the mass block is usually gold. There are 6 gold balance mass blocks 30 on the front and back of the tuning fork. The thickness error is required to be controlled within ±0.5 μm, the thickness uniformity

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  • Method for machining micro-mechanical quartz tuning fork gyro sensitive structure
  • Method for machining micro-mechanical quartz tuning fork gyro sensitive structure
  • Method for machining micro-mechanical quartz tuning fork gyro sensitive structure

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[0054] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0055] The H-shaped quartz tuning fork is a three-dimensional quartz structure, and the three-dimensional structure is usually processed by a multi-layer mask combined with photolithography and etching processes in micromachining. In order to improve the machining accuracy of the gold balance mass, it is necessary to process the gold balance mass by gold electroplating. In order to improve the machining accuracy of the surface electrode, the surface electrode pattern must be transferred to the surface of the tuning fork structure by photolithography before the quartz structure is corroded. Therefore, it is necessary to consider the process compatibility of three-dimensional quartz structure processing, gold balance mass electroplating processing, and electrode pattern processing in the process route, and design the processing steps reasonably.

[0056] A ...

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Abstract

The invention belongs to the field of quartz tuning fork gyro machining, and in particular relates to a method for machining a micro-mechanical quartz tuning fork gyro sensitive structure. The method is characterized in that: the machining method can realize high-accuracy three-dimensional quartz structure machining; the tuning fork thickness error is controlled within +/- 0.5mu m and the plane dimension accuracy error can be controlled within +/- 1mu m; high-accuracy three-dimensional complex electrode pattern processing can be realized; the distance from an electrode to an edge of the tuning fork three-dimensional quartz structure is 10 mu m; the relative position error with the surface of the tuning fork three-dimensional quartz structure can be controlled within +/- 1mu m; different-polarity electrodes can be formed on the same side surface and the machining error is controlled within +/- 5mu m; the precision finishing of a mass block can be realized; the thickness error of the mass block can be controlled within +/- 0.5mu m; the thickness uniformity is controlled within +/- 5 percent; the surface roughness is not more than 0.1 mu m; and the relative position error with the tuning fork three-dimensional quartz structure can be controlled within +/- 1mu m.

Description

technical field [0001] The invention relates to the field of quartz tuning fork gyro processing, in particular to a method for processing a sensitive structure of a micromechanical quartz tuning fork gyro. Background technique [0002] Quartz tuning fork gyroscope is a kind of micro-mechanical gyroscope, which has the characteristics of small size, low cost, high reliability, and strong ability to resist environmental interference. Its performance can reach medium precision and can meet the requirements of a large number of tactical weapons. It is also widely used in many civilian fields. application prospects. [0003] The quartz tuning fork is the sensitive element of the quartz gyroscope. The basic working principle is based on the piezoelectric effect of the quartz crystal and the vibration effect of the Coriolis force. Vibration, when there is an angular rate input around the input axis in the gyro shell, according to the principle of Coriolis force, a force proportion...

Claims

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Application Information

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IPC IPC(8): B81C1/00G01C19/56
Inventor 杨军郑辛唐琼盛洁刘大俊李佳廖兴才刘迎春张菁华朱建伟车一卓李海燕
Owner BEIJING AUTOMATION CONTROL EQUIP INST
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