Cutting process for Z surface X-direction angle control of Z plate seed crystal blocks

Abstract

The invention provides a cutting process for a Z surface X-direction angle control of Z plate seed crystal blocks, comprising the following steps of: measuring the differences of the Z surface X-direction angles of the Z plate seed crystal blocks, processing and controlling the differences of the Z surface X-direction angles of all the Z plate seed crystal blocks to be within +/-5'; sorting the Zplate seed crystal blocks inclining towards one direction and classifying the differences of the Z surface X-direction angles of the Z plate seed crystal blocks according to the difference of +/-1'; sticking the Z plate seed crystal blocks with the same classification on a plate to obtain a seed crystal block sticky mound body; calculating the tilt quantity of the Z plate seed crystal blocks according to the differences of the Z surface X-direction angles of the Z plate seed crystal blocks and the X-direction sizes of the Z plate seed crystal blocks; adjusting the Z surface X-direction cutting angles of the Z plate seed crystal blocks according to the tilt quantity of the Z plate seed crystal blocks until the cutting angle meets the requirement; and cutting the Z plate seed crystal blocksin the seed crystal block sticky mound body in batch by adopting a multiple blade grader. By using the cutting process, the problem that the angle in the vertical direction cannot be corrected when the Z plate seed crystal blocks are cut can be solved. The invention has the advantages of simple process, easiness of operation, batch production availability, stable quality of products and accuracy for angle control.

Description

technical field [0001] The invention relates to a Z-plane X-direction angle-controlled cutting process of a Z-plate seed crystal block, belonging to the technical field of Z-plate seed crystal cutting. Background technique [0002] When cutting the Z-plate seed crystal in the traditional process, the special angle calibration instrument can only correct the angle difference in the Y direction of the Z plane, and the angle difference in the X direction of the Z plane can only be determined by the angle of the original crystal of the Z plate and the accuracy of the cutting equipment. control, and the traditional cutting process can only control the X-direction angle difference within ±20'; After the Z surface of the original crystal plate is processed in place, the Z plate seed crystal of the cut bar is deflected, from figure 1 It can be seen from the figure that from the -X plane to the +X plane of the Z-plate original crystal 1, the inclination degree of the Z-plate seed cr...

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Problems solved by technology

[0002] When cutting the Z-plate seed crystal in the traditional process, the special angle calibration instrument can only correct the angle difference in the Y direction of the Z plane, and the angle difference in the X direction of the Z plane can only be determined by the angle of the original crystal of the Z plate and the accuracy of the cutting equipment. control, and the traditional cutting process can only control the X-direction angle difference within ±20'; After the Z surface of the original crystal plate is processed in place, the Z plate seed crystal of the cut bar is deflected, from figure 1 It can be seen from the figure that from the -X plane to the +X plane of the Z-plate original crystal 1, the inclination degree of the Z-plate seed crystal 2 gradually increases; in order to solve the above-mentioned inclination problem, it is necessary to control the X-direction angle difference of the Z-plate seed crystal at 10 'within

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