Self-adaptive control system and method of magnetic suspension molecular pump

Abstract

The invention relates to self-adaptive control system and method of a magnetic suspension molecular pump. The control system comprises a data acquisition storage unit and an adjusting control unit, wherein the data acquisition storage method used by the data acquisition storage unit comprises the steps of acquiring and storing a mounting angle alpha and a rotating angle beta of the molecular pumpwhen being mounted at a plurality of preset positions in the storage debugging process and acquiring bias current of a radial magnetic bearing, bias current of an axial bearing and a proportion integration differentiation (PID) control parameter which ensure that the molecular pump stably operates at each preset mounting position by the experiment. The adjusting control method used by the adjusting control unit comprises the steps of estimating the mounting angle alpha and the rotating angle beta of the molecular pump according to the static work current when the magnetic suspension molecularpump is mounted at a certain position and reasonably adjusting the bias current of the radial magnetic bearing of the molecular pump, the bias current of the axial magnetic bearing and the PID control parameter to ensure that the molecular pump can stably work at any mounting position.

Description

technical field [0001] The invention belongs to the field of fluid equipment, and in particular relates to an adaptive control system and a control method of a magnetic levitation molecular pump. Background technique [0002] The magnetic suspension molecular pump is a new type of high-performance molecular pump that uses magnetic bearings to generate electromagnetic force to suspend the rotor in the air, so that there is no mechanical contact between the rotor and the stator, and the rotor position can be actively controlled. Because the magnetic levitation molecular pump has the advantages of no friction, no lubrication, no pollution, high speed, long life, etc., the magnetic levitation molecular pump is widely used in the field of vacuum acquisition with high vacuum and high cleanliness. [0003] The load of the magnetic levitation molecular pump is shared by the radial magnetic bearing and the axial magnetic bearing. During the working process, the magnetic levitation m...

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Problems solved by technology

[0005] The technical problem to be solved by the present invention is that the existing molecular pump control program cannot adjust the radial magnetic bearing bias current, axial magnetic bearing bias current and PID control parameters in real time according to the change of the installation position of the molecular pump, and provides a magnetic levitation molecular pump The control system and control method automatically estimate the installation angle α and the rotation angle β of the molecular pump after the installation position of the magnetic levitation molecular pump is changed, and adjust the bias current of the radial magnetic bearing, the bias current of the axial magnetic bearing and the PID control parameters accordingly (that is, Proportional-Integral-Derivative Parameter, PIDParameter, also known as "proportional-integral-derivative control parameters"), to achieve stable operation of molecular pumps

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