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Temperature compensation method for pressure sensor

A technology of pressure sensor and temperature compensation, which is applied in the direction of measuring fluid pressure, instruments, measuring force, etc., to achieve the effects of improving measurement accuracy, easy operation, and avoiding measurement errors

Inactive Publication Date: 2011-04-27
ZHEJIANG GONGSHANG UNIVERSITY
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Problems solved by technology

[0012] However, the above methods of temperature compensation are used indiscriminately for the compensation sampling points
That is: Substitute all the compensation sampling points into the compensation equation to calculate the compensation parameters and compensate the sampling values ​​during normal use; and other segment compensation methods that consider the difference in sensor characteristics in the segment range are also There is essentially no difference between using all segment compensation sampling points for calculation and compensation

Method used

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Embodiment Construction

[0053] Referring to the accompanying drawings, the present invention will be described in detail below.

[0054] like figure 1 As shown, the traditional pressure sensor outputs an analog voltage value after sampling and amplifying (102). In the digital measurement system, it is first converted into a digital signal through the A / D port (101) of the microprocessor (100). In addition, it is necessary to introduce a The standard reference voltage (103) is connected to the Ref reference terminal (104) of the microprocessor (100).

[0055] In this sampling channel, the pressure sensor sampling amplification (102), A / D port (101), and standard reference voltage (103) are coupled together, and the accuracy, static characteristics, and dynamic characteristics of the three are finally expressed as the error of the entire sampling channel characteristic. And all three have the problem of temperature drift. Therefore, the three and the temperature sensor are integrated in one module to...

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Abstract

The invention discloses a temperature compensation method for a pressure sensor. In the method, the coupling error of a measurement system of the pressure sensor can be compensated inside the sensor, and external equipment directly reads a pressure numeric value. The method is simple to operate, and benefits the avoidance of measurement error caused by secondary sampling, and the reduction of the influence of system error and lag error on a gauge point by adopting a multi-calibration averaging method. A pressure compensation curve is fitted by using gauge point reliability analysis and taking variance as weight, and the fitted compensation curve is closer to a reliable gauge point, thereby improving measurement accuracy.

Description

technical field [0001] The invention relates to a pressure sensor temperature compensation method, in particular to a weighted temperature compensation method suitable for a pressure-temperature composite sensor, and belongs to the technical field of pressure measurement temperature compensation. Background technique [0002] Silicon piezoresistive pressure sensors have the advantages of small size, high sensitivity, good dynamic response characteristics, high integration, low cost, etc., and are widely used in the field of pressure detection instruments such as pressure gauges and flow meters. However, due to the problem of temperature drift in the semiconductor process, silicon piezoresistive pressure sensors cannot avoid static and dynamic characteristics changing with temperature changes, and the temperature characteristics of each sensor are different, so they need to be calibrated separately. [0003] In general, the static characteristics that affect the pressure sens...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01L19/04G01L1/00G01L1/22
Inventor 赵文敏朱安定邢建国
Owner ZHEJIANG GONGSHANG UNIVERSITY
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