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Carbon nanotube (CNT) film based ionization nitrogen dioxide sensor and method for measuring concentration by adopting same

A carbon nanotube film, nitrogen dioxide technology, applied in the field of gas sensing, can solve the problems of low sensitivity, large inter-linearity error, large discharge voltage and discharge current, etc., and achieve the effect of high sensitivity and accurate measurement

Inactive Publication Date: 2013-01-02
XI AN JIAOTONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

The sensor has a nonlinear relationship between the breakdown voltage and the gas concentration, and the linear error between the breakdown discharge current and the gas concentration is large; the discharge voltage and discharge current are large; the carbon nanotube film anode cannot measure a single gas
Professor Hui Guohua and Professor Chen Yuquan from the School of Biomedical Engineering and Instrument Science of Zhejiang University developed a carbon nanotube film cathode two-electrode gas sensor under the condition of 120 micron electrode spacing, and studied the discharge characteristics of the sensor in three single gases , due to low sensitivity, does not constitute a gas sensor for measuring concentration

Method used

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  • Carbon nanotube (CNT) film based ionization nitrogen dioxide sensor and method for measuring concentration by adopting same
  • Carbon nanotube (CNT) film based ionization nitrogen dioxide sensor and method for measuring concentration by adopting same
  • Carbon nanotube (CNT) film based ionization nitrogen dioxide sensor and method for measuring concentration by adopting same

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Embodiment 1

[0037] Such as Figure 4 , Figure 5 As shown, the carbon nanotube thin film ionized nitrogen dioxide sensor consists of three electrodes stacked from top to bottom in sequence. The three stacked electrodes are respectively provided with a first electrode 1, a second electrode 2 and a second electrode. Three electrodes 3, the first electrode is composed of a metal film substrate 5 with a carbon nanotube thin film attached to the inner surface and an electrode 4 with air holes; Composition; the third electrode 3 is composed of collectors with blind holes on the electrode plate surface; the three electrodes are separated from each other by insulating pillars 7 respectively.

[0038] Figure 4 In the shown embodiment of the carbon nanotube film ionized nitrogen dioxide sensor, there are two vent holes on the electrode surface of the first electrode 1, and the vent holes are circular; a metal film substrate is attached to the surface of one side of the vent holes 5. A carbon na...

Embodiment 2

[0046] The basic structure of this embodiment is the same as that of Embodiment 1, except that the distance between the three electrodes of the carbon nanotube film ionization nitrogen dioxide sensor is 250 μm and 30 μm respectively, and the first electrode 1 and the second electrode The area of ​​two electrodes and two plates facing each other is 0.01mm 2 , the area of ​​the plate facing the second electrode 2 and the third electrode 3 is 0.01mm 2 .

[0047] There is one vent hole on the electrode surface of the first electrode 1, and the vent hole is quadrilateral, pentagonal or hexagonal; the second electrode 2 has 4 center lead-out holes, and the lead-out holes are quadrilateral, pentagonal or hexagonal ; The number of blind holes in the third electrode 3 is 4, and the blind holes are 3-6 prisms or pyramids.

[0048] The detection method of the present embodiment is basically the same as embodiment 1, the difference is:

[0049] The cathode voltage of the first electrod...

Embodiment 3

[0051] The basic structure of this embodiment is the same as that of Embodiment 1, the difference is that: among the three electrodes of the carbon nanotube film ionized nitrogen dioxide sensor, the electrode spacing between two adjacent electrodes is 250 μm and 30 μm respectively, and the first electrode 1 and The facing area of ​​the second electrode 2 plate is 10mm 2 , the area of ​​the plates facing the second electrode 2 and the third electrode 3 is 100mm 2 .

[0052] There are 4 vent holes on the electrode surface of the first electrode 1, and the vent holes are quadrilateral, pentagonal or hexagonal; the second electrode 2 has 2 central lead-out holes, and the lead-out holes are quadrilateral, pentagonal or hexagonal ; The number of blind holes in the third electrode 3 is 2, and the blind holes are 3-6 prisms or pyramids.

[0053] The detection method of the present embodiment is basically the same as embodiment 1, the difference is:

[0054] The cathode voltage of t...

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Abstract

The invention discloses a carbon nanotube (CNT) film based ionization nitrogen dioxide sensor and a method for measuring concentration by adopting the same. The sensor is characterized in that the sensor comprises a first electrode, a second electrode and a third electrode which are distributed in sequence; the first electrode is provided with air holes; a metal film substrate adheres to the inner surface of the first electrode and CNT films are distributed on the metal film substrate; outlet holes are arranged in the center of the second electrode; blind holes are arranged on the plate surface of the third electrode; and the three electrodes are mutually isolated. The method comprises the following steps: 1) placing three sensors which have different electrode distances; 2) applying voltages to the electrodes; 3) measuring the ion flow value of each sensor; 4) forming samples with the measured values and calibration values of the nitrogen dioxide concentration, temperature and humidity and building a gas concentration measuring database with the samples and interpolated samples; 5) building a data fusion device and establishing a nitrogen dioxide concentration accurate measuring model; and 6) inputting the measured values of the sensors into the measuring model to obtain the accurate measured value of the nitrogen dioxide concentration. The sensor has high sensitivity in detecting gases, good linearity and high accuracy.

Description

technical field [0001] The invention relates to the field of gas sensing, in particular to an ionized nitrogen dioxide sensor based on carbon nanotube film and gas discharge principle and a method for measuring the concentration of nitrogen dioxide. Background technique [0002] With the urgent need of gas measurement in all walks of life and the development of nanotechnology, nanosensors have made great progress. Especially with the discovery of carbon nanotubes at the end of the 20th century, carbon nanotubes have shown attractive application prospects in the fields of gas, temperature and humidity measurement. The carbon nanotube thin film two-electrode ionization sensor in the carbon nanotube gas sensor, temperature sensor and humidity sensor has become a research field in the field of gas, temperature and humidity measurement due to its advantages of high measurement sensitivity, wide gas measurement range and fast response. hot spot. The carbon nanotube film two-elec...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N27/66G01K7/40
Inventor 张勇方静王进张晶园姜为华宋晓慧王影花张建业牛国平王晓冰李昕唐建文刘君华
Owner XI AN JIAOTONG UNIV