Air bearing capable of rotating at low, medium and high speed

Abstract

The invention discloses an air bearing capable of rotating at low, medium and high speed, which comprises an outer ring, a conical section and a conical section connecting ring, wherein the conical section is a hollow symmetrical ring, and the connecting ring is inserted into the conical section to limit the axial and radial displacement of the conical section; the outer ring is concentrically sleeved on the outer end face of the conical section; the hollow area of the inner end face of the conical section or the outer side of the conical section is a processing work area; an air flotation clearance is formed between the outer end face of the conical section and the inner end face of the outer ring, and the outer end face of the conical section and the inner end face of the outer ring installed in mutual fit are installed in a mutual fit way and are two opposite air flotation faces; and the conical section is uniformly provided with a plurality of throttling holes communicated with the air flotation clearance. The hollow area inside the conical section or the outer side of the conical section is used as the processing work area, which is a novel processing form, and an effective tool is provided for many processing forms with special requirements; and the air bearing has the advantages of high processing efficiency, high rotary precision and long service life, and can meet the requirement of batch production.

Description

A low, medium and high speed rotating air bearing technical field The invention relates to an air bearing device capable of rotating at low, medium and high speeds, which is mainly used in the field of precision machining and precision measurement, especially in the field of processing brittle and hard materials such as semiconductors. Background technique Bearings in the traditional sense refer to rolling bearings or hydraulic bearings. The higher the relative motion, the higher the requirements for bearing precision and lubrication, and the shorter the service life. Air bearings (also known as air bearings) are bearings that use a gas (usually air, but possibly other gases) as a lubricant. Air is less viscous than oil, high temperature resistant, and non-polluting, so air bearings can be used in high-speed and high-precision machines, instruments and radioactive devices, but their load capacity is lower than traditional bearings. The static pressure air bearing is an...

AI Technical Summary

Problems solved by technology

At present, the common air bearing products are mostly solid, and the processing of the workpiece can only be completed on one side of the bearing, which is not suitable for some workpieces with special requirements.

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