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Manufacturing method of photonic crystal waveguide for improving lateral far field of stripe laser

A technology of photonic crystal waveguide and fabrication method, which is applied to the structure of optical waveguide semiconductor and other directions, can solve the problems of increased loss, no effective structure, etc., and achieves the effect of high repeatability

Active Publication Date: 2012-12-12
INST OF SEMICONDUCTORS - CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] The development of bar lasers has been quite mature so far. On the issue of how to ensure the lasing of the fundamental mode of the laser, various research groups in the world have proposed various solutions. Metal absorption, plate coupling waveguides, etc. have been used to suppress high-order modes. schemes, but these schemes use the method of increasing loss to achieve mode separation, and there is no effective structure to regulate the light field.

Method used

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  • Manufacturing method of photonic crystal waveguide for improving lateral far field of stripe laser
  • Manufacturing method of photonic crystal waveguide for improving lateral far field of stripe laser
  • Manufacturing method of photonic crystal waveguide for improving lateral far field of stripe laser

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Embodiment 1

[0041] It is mentioned in the background technology that "the coupled waveguide structure is an effective means to achieve mode selection, but in the coupled waveguide structure, the phase difference of the first lasing mode adjacent to the waveguide is π, and the far field presents double peaks", which means It is a problem faced by coupled waveguide lasers at present. How to achieve the first lasing of adjacent waveguides in the same phase mode without phase difference is a key technology. In this example, the following is designed for the near-infrared 1.55um laser figure 1 In the photonic crystal waveguide structure shown, the number of array periods in the current injection region is 3, the array period is 5 μm, and the stripe width is 3 μm; the number of array periods in the optical field modulation region is 4, the array period is 4 μm, and the stripe width is 2 μm. exist figure 1 Under the modulation of the shown structure, the pattern light field distribution in the ...

Embodiment 2

[0043] For single-strip waveguide structures, wide ridge strips can cause multimode lasing, affecting beam quality. In this example, the same design for near-infrared 1.55um laser Figure 4In the photonic crystal waveguide structure shown, there is only one waveguide structure in the current injection area, the strip width is 6um, the array period of the optical field modulation area is 3, the array period is 4μm, and the strip width is 2μm, which are arranged on both sides of the wide strip to form a symmetrical structure . exist Figure 4 Under the modulation of the shown structure, the light field distribution of different modes in the current injection region has changed, and the specific effects can be compared Figure 5-7 . Figure 5 is the required schema, Figure 6 and Figure 7 They are the modulated first-order mode and second-order mode. It can be found that only the fundamental mode is confined to the current injection area, and the high-order mode is extended...

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Abstract

The invention relates to a manufacturing method of a photonic crystal waveguide for improving a lateral far field of a stripe laser, comprising the following steps of: (1) taking a substrate; (2) growing a lower limiting layer, an active area and an upper limiting layer in sequence on the substrate so as to form a horizontal waveguide structure; (3) adopting a method for etching with inductively coupled plasmas to carry out etching on the upper limiting layer, and forming a periodical stripe structure on the upper limiting layer, wherein one part of the stripe structure is a stripe current injection area, and the other part of the stripe structure is a light-field modulating area, and the control of a lateral mode can be achieved by combining the two areas; (4) manufacturing electrodes onthe stripe current injection area to realize selective injection of current; (5) thinning the substrate, and improving the current injection characteristic; and (6) manufacturing back electrodes at the back surface of the substrate and finishing manufacture of the device.

Description

technical field [0001] The invention relates to a one-dimensional waveguide array with two different strip widths and periods, in particular to a method for making a photonic crystal waveguide for improving the lateral far field of a strip laser, so as to improve the lateral far field of the laser characteristic. Background technique [0002] With the development of optical communication, optical interconnection technology and various optoelectronic devices, laser technology has become an indispensable part of the development of modern science and technology. The application of lasers has covered various fields such as life, medicine, exploration, and national defense. With the continuous expansion of the application area, the types of lasers are also increasing. But cheap and reliable are the preconditions for a class of lasers to be popularized. Among many lasers, strip waveguide laser diodes are favored by people because of their low cost, simple manufacturing process, ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01S5/22
Inventor 郑婉华陈微周文君刘安金付非亚张建心渠红伟
Owner INST OF SEMICONDUCTORS - CHINESE ACAD OF SCI