Method and system for testing multi-mode apparatus

A test method and test system technology, applied in the field of computer applications and integrated circuit equipment manufacturing, can solve the problems of long development cycle, high R&D cost of integrated circuit manufacturing equipment, failure to predict failures, etc.

Inactive Publication Date: 2011-09-07
TSINGHUA UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, limited by the test conditions, it is impossible to predict possible failures in advance
Therefore, there are problems of high R&D cost and long development cycle of integrated circuit manufacturing equipment

Method used

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  • Method and system for testing multi-mode apparatus
  • Method and system for testing multi-mode apparatus
  • Method and system for testing multi-mode apparatus

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Embodiment Construction

[0045] Embodiments of the present invention are described in detail below, examples of which are shown in the drawings, wherein the same or similar reference numerals designate the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the figures are exemplary only for explaining the present invention and should not be construed as limiting the present invention.

[0046] The multi-mode instrument testing method and system provided by the embodiment of the present invention are implemented on the Windows XP operating system, based on .NET Framework 3.5, and using Visual C# technology. The exclusive control of the data acquisition card is realized by setting the running flag for the test project, wherein the test project includes two types: instrument test project and equipment test project. Through the exclusive control of the data acquisition card, it is ensured within each test project and betwee...

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Abstract

The invention provides a method for testing a multi-mode apparatus. The method comprises the following steps of: loading a plurality of pieces of testing engineering, wherein the plurality of pieces of the testing engineering comprises apparatus testing engineering and equipment testing engineering; setting running identifiers for the apparatus testing engineering and the equipment testing engineering, performing monopolistic control on a data acquisition card by adjusting the running identifiers, and occupying the data acquisition card in different time sharing by the apparatus testing engineering and the equipment testing engineering; detecting a communication type of an apparatus to be tested or equipment to be tested, and initializing the corresponding data acquisition cards respectively according to the communication type; and running the plurality of pieces of testing engineering in a preset command mode by the data acquisition card. In the invention, the monopolistic requirement on the data acquisition card and communication network using is met during testing of the different apparatuses to be tested or in the different testing engineering by setting the running identifiers, and test on a plurality of characteristics, such as an apparatus execution instruction, time delay, a continuous execution instruction and the like is realized at the same time. The invention also discloses a system for testing the multi-mode apparatus.

Description

technical field [0001] The invention relates to the field of computer application technology and the field of integrated circuit equipment manufacturing, in particular to a multi-mode instrument testing method and system. Background technique [0002] With the continuous improvement of the integration level of integrated circuit chips and the continuous improvement of chip functions, users have higher and higher requirements for technology. However, many problems are faced in the research and development of integrated circuit manufacturing equipment. For example, in the research and development of integrated circuit equipment, there is not only the research and development of the hardware part, but also the research and development of the control software system for the equipment. In order to ensure the normal operation of the instrument, the instrument test is a process that must be completed before the instrument is installed in the specific equipment. After the hardware...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01D21/00G05B19/02
Inventor 田凌苏孝钐刘敏黄利平
Owner TSINGHUA UNIV
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