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Oscillator device

A technology of oscillators and devices, applied in power oscillators, electrical components, steering sensing equipment, etc., can solve nonlinear problems

Active Publication Date: 2011-09-07
NXP BV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0012] Another disadvantage of using electrostatic actuation is that electrostatic actuation produces an inherently non-linear signal, since the electrostatic force depends not only on voltage but also on displacement

Method used

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Embodiment Construction

[0052] The invention provides an oscillator in which the oscillation of the resonator mass is controlled by piezoresistive elements.

[0053] In the devices of the present invention, three physical phenomena are coupled: thermal, electrical (eg piezoresistive) and mechanical.

[0054] figure 2 is a brief schematic diagram of the device of the present invention. The device consists of a mass-spring system (m for effective mass and k for effective spring stiffness) and one or more feedback elements 20 . In the following description these are referred to as sense-actuation (S-A) elements, since they provide not only the control of the oscillation, but also the electrical oscillation signal output from the device.

[0055] The sensing actuation element 20 connects the block to the fixed frame of the device, ie the substrate. In practice, the sense-actuation element and block can be the spring itself or part of the spring. exist figure 2 and in the following detailed descrip...

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PUM

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Abstract

An oscillator device comprises a resonator mass which is connected by a spring arrangement to a substrate and a feedback element for controlling oscillation of the resonator mass, which comprises a piezoresistive element connected between the resonator mass and the substrate. The invention provides an oscillator device in which the two parts (resonator and circuit to close the oscillation loop) are combined inside one single oscillator device, which can be a MEMS device.

Description

technical field [0001] The present invention relates to oscillator devices that can be implemented, for example, using MEMS technology. Background technique [0002] Many research groups are working intensively on MEMS oscillators, and some first-generation products have been released recently. Devices of this type offer high Q factors, small size, high levels of integration, and potentially low cost. These devices are expected to replace bulky quartz crystals in high precision oscillators. [0003] Such oscillators are widely used in timing and frequency reference applications, for example, RF modules in mobile phones, devices containing Bluetooth modules, and other digital and communication devices. Since the oscillation frequency can depend on mass, temperature, acceleration or magnetic fields, oscillators are also used as extremely sensitive sensors. [0004] exist figure 1 A conventional MEMS-based oscillator is schematically shown in . [0005] Basically, this con...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H03B5/30G01C19/56H10N30/20H10N30/00
CPCG01C19/56H03B5/30
Inventor 金·范乐约瑟夫·托马斯·马丁内斯·范贝克皮特·杰勒德·斯蒂内肯
Owner NXP BV