Method for optimally adjusting console parameters in semiconductor technology

A semiconductor and parameter technology, which is applied in the field of optimization and adjustment of semiconductor process machine parameters, can solve problems such as inability to effectively and reliably search and judge, and achieve the effects of saving production costs, improving quality and production efficiency

Active Publication Date: 2011-09-21
SEMICON MFG INT (SHANGHAI) CORP +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0010] In order to solve the problem that the existing technology cannot effectively and reliably search and determine the machine with the optimal parameters in the production environment, improve the quality and production

Method used

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  • Method for optimally adjusting console parameters in semiconductor technology
  • Method for optimally adjusting console parameters in semiconductor technology
  • Method for optimally adjusting console parameters in semiconductor technology

Examples

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[0048] In the following description, a lot of specific details are given in order to provide a more thorough understanding of the present invention. However, it is obvious to those skilled in the art that the present invention can be implemented without one or more of these details. In other examples, in order to avoid confusion with the present invention, some technical features known in the art are not described.

[0049] In order to thoroughly understand the present invention, detailed steps will be presented in the following description to illustrate how the present invention solves the problem of effectively and reliably finding and determining the optimal machine in the production environment. Obviously, the implementation of the present invention is not limited to the specific details familiar to those skilled in the semiconductor field. The preferred embodiments of the present invention are described in detail as follows. However, in addition to these detailed descriptio...

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Abstract

The invention discloses a method for optimally adjusting console parameters in a semiconductor technology. The method comprises the following steps of: according to statistic data of parameters of each console in a semiconductor technical environment, determining the console with the optimal parameters in the semiconductor technical environment; and enabling the parameters of the consoles in the semiconductor technical environment to match the parameters of the console with the optimal parameters. By the method, the problem that in the prior art, the console with the optimal parameters in thesemiconductor technical environment cannot be effectively and reliably searched and determined is effectively solved; and by searching and determining the console with the optimal parameters in the semiconductor technical environment effectively and reliably and regulating the parameters of the other consoles in the semiconductor technical environment according to the parameters of the console with the optimal parameters and a matching and determining standard, the quality of the produced product and the production efficiency are greatly improved and the production cost is greatly reduced.

Description

technical field [0001] The invention relates to the field of semiconductor manufacturing technology, in particular to a method for optimizing and adjusting the parameters of a semiconductor technology machine Background technique [0002] The traditional methods for guaranteeing and evaluating the quality and reliability of semiconductor components in the field of semiconductor technology are: (1) Routine testing and inspection, including process monitoring during the production process, screening test before the product leaves the factory, and batch acceptance sampling inspection when the product is delivered. (2) Reliability life test. (3) On-site use data accumulation. (4) Re-screening of purchased semiconductor components by complete machine factories. The essence of these traditional methods is "post-inspection" centered on "qualification". [0003] With the improvement of the level of components in the current semiconductor process, when the reliability level of sem...

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Application Information

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IPC IPC(8): H01L21/00
Inventor 王邕保郭玉洁
Owner SEMICON MFG INT (SHANGHAI) CORP
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