Capacitive micro machinery gyroscope

Abstract

The invention discloses a capacitive micro machinery gyroscope, belonging to the technical field of a micro electrical mechanical system. A gyroscope mass block 15 is connected with the center of a lever 12; two pivot points are symmetrically distributed between the center and two end points of the lever 12, and the distance h0 from the pivot points to the center of the lever is less than the distance h1 from the pivot point to the end points of the lever; simultaneously two end points of the lever 12 are respectively and sequentially connected with a sensitive transmission beam 8 in Y direction and two sensitive bent beams 9 in X direction; the other end of each sensitive bent beam 9 of two is respectively connected with two end points of a non-deformed beam 16; a moving comb tooth and astatic comb tooth fixed on the non-deformed beam 16 form a sensitive detection comb tooth pair 10 to complete the capacitance detection at the sensitive direction. According to the invention, the displacement detection and the lever amplification technology in the traditional micro machinery gyroscope are combined, the displacement amplification effect of the mass block at the Y direction by the lever is h1 / h0, thus the variation of the detection capacitance is increased, and the flexibility of the micro machinery gyroscope is improved.

Description

[0001] 1. Field [0002] The invention relates to a capacitive micromechanical gyroscope, which belongs to the technical field of microelectromechanical systems. 2. Background technology [0003] Due to its small size, low power consumption, and low cost, micromechanical gyroscopes have broad application prospects in military fields such as inertial navigation and attitude reference. According to the detection method, the micromechanical gyroscope can be divided into capacitive gyroscope, resonant gyroscope, piezoresistive gyroscope, piezoelectric gyroscope, optical gyroscope, etc. Traditional micromechanical gyroscopes are based on the detection of Coriolis force to obtain the input angular velocity. [0004] The capacitance detection method has the advantages of simple structure and high precision, and is widely used in various micro-mechanical sensors. Many micro-mechanical gyroscopes are obtained by measuring the displacement of the sensitive direction perpendicular to th...

AI Technical Summary

Problems solved by technology

However, in practical applications, the Coriolis force generated by the micromechanical gyroscope is extremely small, and the change in the resonant frequency of the resonator caused by it is also extremely small, so it is difficult to achieve high sensitivity

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