Method for pasting strain foil and equipment for pasting strain foil

A strain gauge and equipment technology, applied in the field of semiconductor silicon strain gauge sensor manufacturing, can solve the problems of low reliability, low precision of strain gauge pressure sensor, and low yield

Inactive Publication Date: 2011-10-19
MEASUREMENT SPECIALTIES CHINA
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  • Summary
  • Abstract
  • Description
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  • Application Information

AI Technical Summary

Problems solved by technology

Since the strain gauge is small and extremely thin, it is completely dependent on the experience of the workers. Any mistakes made by the workers in the operation will have a great impact on the quality of the strain gauge pressure sensor. Therefore, the accuracy of the strain gauge pressure sensor manufactured by this method Low, poor performance, poor consistency, low reliability and low yield

Method used

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  • Method for pasting strain foil and equipment for pasting strain foil
  • Method for pasting strain foil and equipment for pasting strain foil
  • Method for pasting strain foil and equipment for pasting strain foil

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Embodiment Construction

[0026] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention.

[0027] The invention provides a method for manufacturing strain gauge sensors using micro-melting technology, comprising the following steps:

[0028] (1) Separate the strain gauges from the master plate engraved with the strain gauges;

[0029] (2) Add the fixing glue for fixing the strain gauge on the sensor metal structure supporting the strain gauge;

[0030] (3) Align the strain gauges on the fixed colloid;

[0031] (4) Heat and melt the fixing glue, sink the strain gauge into the melted fixing glue to a set depth, and after the fixing glue cools, the strain gauge is permanently fixed on the...

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Abstract

The invention is suitable for the field of a method for manufacturing a micro-fusion semiconductor silicon strain foil sensor, which provides a method for pasting a strain foil. The method provided by the invention comprises the following steps: 1) coating viscose on at least one fixing glue which is coated on a pressure film; 2) placing the strain foil on the fixing glue by means of the viscose,thereby enabling the strain foil and the fixing glue to be pasted; and 3.) moving the strain foil in the specified position of the fixing glue. After the technical scheme is adopted, one strain foil is pasted on another strain foil through the three steps; the viscose is pasted on the fixing glue; the strain foil is fixed on the fixing glue; the strain foil and the fixing glue are pasted; and thestrain foil is moved to the specified position of the fixing glue, thereby better realizing the technical effect that the strain foil is accurately pasted in the specified position of the fixing glue. The invention also provides equipment for pasting the strain foil.

Description

technical field [0001] The invention belongs to the field of manufacturing semiconductor silicon strain gauge sensors, and in particular relates to a method for sticking strain gauges and equipment for sticking strain gauges. Background technique [0002] The working principle of the strain gauge is that when the external environment is strong, light, temperature, humidity, etc. affect the strain gauge, it will cause changes in the resistance, inductance, capacitance, etc. Measurement. [0003] In reality, the widely used strain gauges are mainly made of piezoresistive strain sensing materials, which are called strain gauge pressure sensors. The main working principle is: the measured pressure is transmitted to the piezoresistive strain sensor The diaphragm, elastic beam or strain tube of the material is deformed, and the bridge composed of piezoresistive strain sensing material will have an unbalanced voltage output, which is proportional to the measured pressure acting on...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01L1/18
Inventor 许波刘国强李浩然楚汤姆
Owner MEASUREMENT SPECIALTIES CHINA
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