Micro-electro mechanical system (MEMS) light valve based display device and forming method thereof
A display device and light valve technology, applied in optics, optical components, static indicators, etc., can solve the problems of complex process and high manufacturing cost, and achieve the effects of reducing manufacturing cost, simple structure, and simplifying manufacturing process
Active Publication Date: 2012-12-19
XIAN YISHEN OPTOELECTRONICS TECH CO LTD
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Problems solved by technology
[0006] The problem solved by the present invention is to provide a display device based on MEMS light valve and its forming method, which solves the problems of complex process and high manufacturing cost of the existing TFT-MEMS light valve display device
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[0061] In order to make the above objects, features and advantages of the present invention more comprehensible, specific implementations of the present invention will be described in detail below in conjunction with the accompanying drawings.
[0062] A display device according to a specific embodiment of the present invention will be described in detail below in conjunction with specific embodiments.
[0063] figure 1 It is a schematic diagram of the circuit structure of a display device based on a MEMS light valve. like figure 1 As shown, the display device in this embodiment includes: a substrate, a plurality of scanning lines 11, 12, ..., 1m located on the substrate, and a plurality of data lines 21, 22, ... . . . 2n, multiple MEMS switches 30 , capacitors 40 and MEMS light valves 50 located on the substrate; multiple scanning lines are parallel to each other, multiple data lines are parallel to each other, and the data lines and the scanning lines are perpendicular to ...
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The invention provides a micro-electro mechanical system (MEMS) light valve based display device. The device comprises a substrate, an MEMS switch and an MEMS light valve positioned on the surface of the substrate, wherein the MEMS light valve at least comprises a fixed optical grating and a movable optical grating which is arranged relative to the fixed optical grating; the MEMS switch is electrically connected with the MEMS light valve; and the relative positions of the movable grating and the fixed grating in the MEMS light valve can be controlled by applying an electric signal to the MEMSlight valve through the MEMS switch. The invention also provides a method for forming the MEMS light valve based display device. The MEMS switch with a simple structure is adopted to replace a traditional thin film transistor (TFT) switch, and the electric signal is applied to the MEMS light valve through the MEMS switch, so that the relative positions of the movable optical grating and the fixedoptical grating in the MEMS light valve can be controlled; and the MEMS switch has a simple structure, so that the manufacture process for the display device is greatly simplified, and the manufacture cost is reduced.
Description
technical field [0001] The invention relates to the field of semiconductor manufacturing, in particular to a display device based on a MEMS light valve and a forming method thereof. Background technique [0002] Liquid crystal flat panel display, especially TFT-LCD, is a display device that catches up with and surpasses CRT in terms of comprehensive performance such as brightness, contrast, power consumption, life, volume and weight. It has excellent performance, good mass production characteristics, and automatic High degree, low cost of raw materials, broad development space, may be the mainstream product of the next generation of displays. [0003] The liquid crystal display device mainly includes: a substrate, in which a backlight source is provided; pixel electrodes are located on the substrate, and a TFT (thin film transistor switch) array is also provided on the substrate, and the TFT (thin film transistor switch) array is used to communicate with the pixel The elect...
Claims
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IPC IPC(8): G02B26/02G09G3/34
Inventor 毛剑宏唐德明
Owner XIAN YISHEN OPTOELECTRONICS TECH CO LTD