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Rotary air floating system

A technology of air flotation and rotating base, applied in the field of air flotation system, can solve the problems of inability to achieve precise positioning, unstable operation, low reliability, etc., meet the requirements of modern wafer processing technology, reliable structure, and improve work efficiency Effect

Inactive Publication Date: 2014-01-15
CETC BEIJING ELECTRONICS EQUIP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

This kind of device has certain deficiencies in practical application, such as low reliability, complex structure, unstable operation, inability to achieve precise positioning, and problems that are difficult to control

Method used

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  • Rotary air floating system
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  • Rotary air floating system

Examples

Experimental program
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Embodiment Construction

[0013] like figure 1 and figure 2 As shown, the present invention includes a motor 7, a shaft 8 connected to the motor 7, a rotating base 9 arranged on the upper end of the motor 7, a pressure ring 2 arranged on the shaft 8, a transmission ring connected to the pressure ring 2 through a pin 8 6. The bearing pressure ring 4 fixedly connected to the pressure ring 2 through the adjustment ring 3 , the throttle I 1 arranged in the bearing pressure ring 4 and the throttle II 5 arranged on the rotating base 9 .

[0014] Throttle I 1 is pressed into the bearing pressure ring 4, the bearing pressure ring 4 is fixed together with the pressure ring 2 through the screw and the adjustment ring 3, the pressure ring 2 is fixed on the shaft 8, and the pressure ring 2 is connected with the transmission ring 6 through the pin 10 , the restrictor II 5 is pressed into the swivel base 9; as image 3 As shown, after ventilation, the motor 7 drives the shaft 8 to rotate, and then drives the tran...

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PUM

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Abstract

The invention provides a rotary air floating system comprising a throttler I, a throttler II, a compression ring, a regulating ring, a bearing pressing ring, a transmission ring, a motor, a shaft and a rotary base, wherein the transmission ring rotates along with the rotation of shaft which is driven by the motor; air enters from the lower end of the rotary base and comes out of the throttler II; pushed by the air pressure, the transmission ring is lifted to separate from the rotary base, thus realizing the approximate zero-friction rotation and the accurate positioning in the range of 240 degrees. Similarly, the air enters from the upper end of the bearing pressing ring and comes out of the throttler I, thus the transmission ring descends to reduce the speed. The rotary air floating system is compact in structure, simple in installation, reliable in adjustment and convenient to apply, and can be applied in special semiconductor equipment widely.

Description

technical field [0001] The invention relates to an air flotation system, in particular to a rotary air flotation system applied to semiconductor special equipment. Background technique [0002] During the processing of wafers by special semiconductor equipment, due to the requirements of the processing technology, the workbench needs to be accurately positioned within a range of 240 degrees through the air flotation system. In modern production equipment, the common rotary positioning system is usually: the shaft is directly driven by the motor, and rotates at a certain angle to achieve rotary positioning. This kind of device has certain deficiencies in practical application, such as low reliability, relatively complicated structure, unstable operation, inability to achieve precise positioning, and problems of difficulty in control. Contents of the invention [0003] The object of the present invention is to provide a rotary air flotation system for semiconductor special ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/68
Inventor 王仲康张敏杰王欣
Owner CETC BEIJING ELECTRONICS EQUIP