Method for judging etching ending point through valve opening

A technology of etching termination and valve opening, applied in the direction of semiconductor/solid-state device testing/measurement, etc., can solve the problem of high cost and achieve the effect of low cost, stable process and high reliability

Inactive Publication Date: 2012-02-01
PIOTECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0010] The purpose of the present invention is to provide a method for judging the end point of etching through the valve opening, so as to solve the problems of high cost in the prior art

Method used

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  • Method for judging etching ending point through valve opening

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Experimental program
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Effect test

Embodiment 1

[0024] Such as figure 1 As shown, in the process of etching and cleaning the chamber of the PECVD equipment, the pressure in the chamber 1 remains unchanged, and the method of judging the completion of etching and cleaning is determined by monitoring the opening of the valve 3 on the exhaust pipe 2 .

[0025] In the etching process, the process parameters are as follows:

[0026] Oxygen flow: 1600sccm;

[0027] C 2 f 6 Flow: 1600sccm;

[0028] Pressure inside the chamber: 3 Torr (torr);

[0029] During the etching process, when the opening of the valve changes from 17% to 13%, the etching cleaning is completed.

[0030] In this embodiment, the controller of the valve can monitor the opening degree of the valve.

[0031] After adopting this embodiment to judge that the etching is terminated, the test data are as follows:

[0032] Table 1

[0033] valve opening

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PUM

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Abstract

The invention relates to the field of plasma-enhanced chemical vapor deposition (PECVD) equipment etching, in particular to a method for judging an etching ending point through valve opening. The method is used for judging washing finish when a cavity of PECVD equipment is washed through etching. The method is characterized in that the cavity, the etching ending point of which needs to be judged, is communicated with an exhaust duct; the exhaust duct is provided with a valve; the etching ending point is judged through the opening of the valve on the exhaust duct; and during etching, the pressure is constant and the etching ending point is judged through the opening of the valve on the exhaust duct. The method has the following beneficial effects: the method is simple and convenient and has high reliability; and the problems such as higher cost in the prior art are solved by adopting the method.

Description

technical field [0001] The invention relates to the field of PECVD equipment etching, in particular to a method for judging the end point of etching through the opening of a valve, which is a method for judging the completion of cleaning when the PECVD equipment performs cavity etching and cleaning. Background technique [0002] Etching technique is a technique for selectively etching or stripping the surface of the semiconductor substrate or the surface covering film according to the mask pattern or design requirements in the semiconductor process. [0003] Etching and cleaning of PECVD equipment refers to: after the PECVD equipment deposits thin film process, there will be thin film deposited on the inner wall of the cavity and the surface of parts inside the cavity. When the thin film accumulates too much, it will fall off on the wafer, seriously affecting Thin film process. Therefore, they need to be cleaned by etching before the film falls off. [0004] Etching and cl...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/66
Inventor 林英浩
Owner PIOTECH CO LTD
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