Wafer holding device and method of use thereof
A wafer fixing and component technology, used in semiconductor/solid-state device manufacturing, electrical components, circuits, etc., can solve problems such as wafer damage and achieve the effect of ensuring operational safety
Active Publication Date: 2016-09-07
SHANGHAI HUAHONG GRACE SEMICON MFG CORP
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Problems solved by technology
[0003] The technical problem to be solved by the present invention is to provide a wafer holding device and its use method to solve the problem that damage to the wafer due to the failure of other pushing elements cannot be avoided only by detecting one pushing element in the wafer holding device
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[0020] A wafer fixing device and its usage method proposed by the present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments. Advantages and features of the present invention will be apparent from the following description and claims. It should be noted that all the drawings are in very simplified form and use imprecise ratios, which are only used for the purpose of conveniently and clearly assisting in describing the embodiments of the present invention.
[0021] The core idea of the present invention is to provide a wafer fixing device, in which a monitoring element is provided on each pushing element to ensure that each pushing element and the clamp corresponding to each pushing element can be monitored in real time whether it is working normally, so as to ensure that each All the fixtures can hold the wafer normally. The invention also provides a method for using the wafer fixing device. After a plu...
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The wafer fixing device provided by the present invention includes a plurality of pushing elements and a plurality of grippers controlled separately, and further includes: monitoring elements connected to each other are respectively arranged on the plurality of pushing elements, and each of the monitoring elements is connected to Signal control analyzer connection. The present invention also provides a method for using the above-mentioned wafer fixing device, including: a plurality of monitoring elements respectively read the position movement information of the pushing element; transmit the position movement information to a signal control analyzer; the signal control analysis The device compares whether the position movement information of each of the pushing elements is normal; if the position movement information is abnormal, check the wafer fixing device. In the wafer fixing device provided by the present invention, a monitoring element is arranged on each pushing element to ensure that each pushing element and the clamp corresponding to each pushing element can be monitored in real time whether it is working normally, thereby ensuring that each clamp can clamp normally. live wafer.
Description
technical field [0001] The invention relates to the technical field of integrated circuit manufacturing technology, in particular to a wafer fixing device and a using method thereof. Background technique [0002] Manufacturing semiconductor components with tiny structures requires highly precise technology. During the manufacturing process, the wafer is placed on the carrier table. When performing different processes on the wafer, the wafer needs to be fixed, and the wafer needs to be taken out after the process is completed. If there is a deviation when the wafer is fixed or taken out , it is easy to cause damage to the wafer, so it is very important to detect the fixed state of the wafer. figure 1 It is a schematic cross-sectional structure diagram of a wafer fixing device in the prior art. refer to figure 1 , the wafer fixture includes a plurality of pushing elements 11, a plurality of pushing elements 11 are fixed in the base plate 16, and a plurality of pushing plate...
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IPC IPC(8): H01L21/683
Inventor 陈超包中诚华俊杰
Owner SHANGHAI HUAHONG GRACE SEMICON MFG CORP