The invention discloses a semiconductor device test system and a test method thereof. The test system comprises an upper computer, an oscilloscope, a main control system PLC, a circuit control moduleand a test box body. An automatic tool is arranged in the test box body, a tested piece is placed on the automatic tool, and a test fixture is arranged right above the tested piece. The automatic toolcomprises a driving device, the driving device drives the automatic tool to move so as to drive the tested piece to be connected with the test fixture, and the main control system PLC is connected with the test box body, the test fixture, a main circuit unit and a gate pole driving unit. The upper computer is connected with the oscilloscope, and the oscilloscope is connected with the test box body. The advantages of the present invention are that the semiconductor device test system with a specific testing circuit and a testing system structure is designed, the theory is combined with the practice, and all devices in the system are matched with one another to test the semiconductor device.